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Edwards nEXT200200, Инструкция по эксплуатации

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Contents

1.  Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   8

1.1  Definition of Warnings and Cautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   8
1.2  Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   8
1.3  Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  9

2.  Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  10

2.1  Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   10
2.2  Pump controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   11
2.3  Operational features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   12

2.3.1  Power limit setting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   12
2.3.2  Standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  12
2.3.3  Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   12
2.3.4  Analogue output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   13
2.3.5  Automatic vent options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   13
2.3.6  Normal speed setting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   14

2.4  Logic interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  14

2.4.1  Parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   14
2.4.2  Serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   15
2.4.3  Serial control with parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . .   15
2.4.4  Parallel control with serial monitoring or serial configuration. . . . .   15
2.4.5  Controller configuration (serial configuration). . . . . . . . . . . . . . . . . .   16

3.  Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   17

3.1  General technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   17
3.2  Operation and storage environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   22
3.3  Vent gas specification and vent control data. . . . . . . . . . . . . . . . . . . . . . . . . .   22
3.4  Purge gas specification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  23
3.5  Cooling water. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   24
3.6  Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   24
3.7  Pumping media. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  25
3.8  Materials exposed to gases pumped. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   26
3.9  Logic interface connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   27
3.10  Controller connector socket. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   29
3.11  Indicator LED's. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   30

4.  Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  32

4.1  Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   32
4.2  Typical installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   33
4.3  Connect to the vacuum system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   33

4.3.1  Inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   34
4.3.2  Mechanical fixing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   35

Page 3

Содержание nEXT200200

Страница 1: ...nEXT Turbomolecular Pumps nEXT200200 INSTRUCTION MANUAL B85200880_D Original instructions edwardsvacuum com...

Страница 2: ...ontent As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly installed and used in accordance with their operating instruc...

Страница 3: ...ty requirements Vacuum pumps EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use General requirements EN 61326 1 2013 Electrical equipment for measu...

Страница 4: ...osal of the product including any substance based requirements Article 33 1 Declaration This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0...

Страница 5: ...hers PBDE Aluminium alloys X O O O O O Brass pipe fitting X O O O O O Brass connectors X O O O O O PCA Printed Circuit Assembly PCA X O X O O O O GB T 26572 O Indicates that the hazardous substance co...

Страница 6: ...This page has been intentionally left blank...

Страница 7: ...parallel monitoring 15 2 4 4 Parallel control with serial monitoring or serial configuration 15 2 4 5 Controller configuration serial configuration 16 3 Technical data 17 3 1 General technical data 1...

Страница 8: ...col 44 4 7 4 Message structure 46 4 7 5 Command set 46 4 7 6 Multi drop operation 50 4 8 Connection for mixed parallel and serial operation 50 4 9 Vent options vent valve connection and control 52 4 9...

Страница 9: ...with high inlet pressure 70 6 7 2 Operation at high temperatures 70 6 7 3 Protection against over speed 70 6 7 4 Electrical supply failure 71 6 8 Bakeout 73 7 Maintenance 74 7 1 Introduction 74 7 2 Be...

Страница 10: ...83 8 23 Useful service information 85 9 Storage 87 10 Disposal 88 11 Service 89 11 1 Return the equipment or components for service 89 11 2 Bearing and oil cartridge on site maintenance 90 12 Spares...

Страница 11: ...ing pin numbers 30 Figure 9 Typical pumping system with a nEXT pump 34 Figure 10 Logic interface connections parallel control 40 Figure 11 Controller status information 42 Figure 12 Logic interface co...

Страница 12: ...r nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNING If you do not obey a warning there is a risk of injury or death Dif...

Страница 13: ...ial hazard from a hot surface Warning Protective earth ground The equipment must be grounded 1 3 Trained personnel Trained personnel for the operation of this pump are skilled workers with knowledge i...

Страница 14: ...this will cause damage to the electrical connections A nEXT pump has a turbomolecular pump with a permanently attached controller which has drive electronics The controller controls the electrical su...

Страница 15: ...curs Refer to Indicator LED s on page 30 The drive electronics system has a number of built in safety features to prevent the pump from damage during sustained high pressure or temperature The electro...

Страница 16: ...e the pump rotational speed is lower than the full rotational speed The default setting for standby speed is 70 of the full speed To operate the pump at standby speed it must be in the start condition...

Страница 17: ...plicable meter or indicator to display the applicable system parameter or connect it to the customer control equipment for example to operate other components in the pumping system at set values The a...

Страница 18: ...interface supports the serial control and the parallel control to monitor and control through one connector For serial control RS232 default or RS485 can be selected using the RS485 RS232 slide switc...

Страница 19: ...page 41 for more information about the serial interface 2 4 3 Serial control with parallel monitoring Normal and analogue signals stay available when using serial control You can control the pump thr...

Страница 20: ...a pump s configuration You can download the configuration to another pump This is useful when you configure a number of pumps with the same settings before they are installed at a system Note The RS48...

Страница 21: ...nt for indoor use only Enclosure protection installed IP40 Reduce gas load when operating in the magnetic field Table 3 nEXT pumps technical data Parameter nEXT200200D nEXT200200iD nEXT200200T nEXT200...

Страница 22: ...x 104 Interstage pumping speed N2 13 l s 13 l s He 13 l s 13 l s H2 11 l s 11 l s Peak booster Pumping speed nitrogen RV12 backing pump 26 m3h 1 26 m3h 1 XDS10 backing pump 24 m3h 1 24 m3h 1 Recommend...

Страница 23: ...Figure 1 nEXT200200 main inlet performance curve Figure 2 nEXT200200 side inlet performance curve Page 19 B85200880_D Technical data...

Страница 24: ...Figure 3 nEXT 200200 NW25 interstage port pumping speed Page 20 B85200880_D Technical data...

Страница 25: ...witch vent valve socket 5 Booster port A 6 Base mounting holes and fan mountings 7 Earth point 8 Electrical drive unit 9 Body purge port 10 Backing port 1 Envelope vent 2 LED indicators on drive unit...

Страница 26: ...ster port A 6 Base mounting holes and fan mountings 7 Earth point 8 Electrical drive unit 9 Body purge port 10 Backing port 3 2 Operation and storage environment Table 4 Operation and storage environm...

Страница 27: ...ecommended time for the rotational speed to reach 50 15 seconds Maximum permitted rate of increase of pressure Refer to Figure Maximum allowed rate of increase in pressure during venting pressure agai...

Страница 28: ...n 4 parts per million Minimum cooling water flow rate at 15 C 15 l hr 1 Water temperature 10 to 20 C Maximum water pressure 5 bar gauge 73 5 psig 6 x 105 Pa Materials exposed to the cooling water Nick...

Страница 29: ...ntain an explosion WARNING DANGEROUS GASES Risk of damage to equipment In the interstage and booster versions of the nEXT pumps gas pumped through the interstage port will mix with gas pumped through...

Страница 30: ...concentration above 20 by volume Refer to Purge gas specification on page 23 for purge gas specification If the pump is not purged the oxygen concentration must be less than 20 by volume Water vapour...

Страница 31: ...with ripple 24 48 V d c 5 10 21 6 to 50 4 V d c Maximum voltage ripple 0 5 V r m s Fuse rating 10 A for 24 V d c supply 5 A to 10 A for 48 V d c supply Type T IEC approved or Time delay fuse UL CSA ap...

Страница 32: ...voltage Mating half of connector not supplied Table 9 Logic interface connector pins Pin Number Signal Polarity Use 2 0 V Control reference 0 V reference for all control and status signals below 3 ST...

Страница 33: ...urbo pump controllers 3 10 Controller connector socket The pump has a 3 way controller connector socket at the side of the controller When the pump is shipped the 3 way controller connector is conceal...

Страница 34: ...data on page 30 For higher currents the output voltage will decrease and can set to off to limit the current Table 10 Controller technical data Description Data Connector plug Phoenix part number FK...

Страница 35: ...the LED flashes in a sequence to show which service operation is necessary Refer to Fault finding on page 76 Alarm LED The red LED flashes in a sequence to show an error code if a fail condition prev...

Страница 36: ...vent the entry of dust and vapour 3 Do not remove the seals until the pump is installed on the vacuum system 4 Remove the packing materials from the pump 5 Check the pump 6 Keep all the packing materi...

Страница 37: ...view on page 92 4 3 Connect to the vacuum system WARNING TRIP HAZARD Risk of injury and damage to equipment Make sure that the cable and pipe work attached to the pump are carefully routed Failure to...

Страница 38: ...uge 2 Vacuum system 3 Differential aperture 4 Foreline trap 5 Backing pump 6 Mist filter 7 Flexible bellows 8 Vacuum gauge 9 nEXT split flow pump 10 Backing valve 11 WCX water cooler and connections 1...

Страница 39: ...he pump 4 3 3 Inlet connection and orientation The pump can be installed at the vacuum system through the inlet flange You can mount the pump in vertical and upright through to horizontal 2 If the pum...

Страница 40: ...a backing pressure less than 5 x 10 4 mbar 5 x 10 2 Pa Lower backing pressures increases the evaporation rate of the lubrication oil and can decrease the life of the bearings Note Make sure that the d...

Страница 41: ...urge gas specification on page 23 1 To supply the purge gas to the pump remove the plug installed in the purge port 2 To install a vent port adaptor refer to Accessories on page 92 3 Connect the purge...

Страница 42: ...that shows the pump type as nEXTp the serial connection is disabled start and stop is possible 4 5 3 Connect the logic interface to the customer control equipment If you operate the pump with the cust...

Страница 43: ...n you connect the pump to the power supply make sure that all 3 pins for the 24 48 V connection and all 3 pins for the 0 V connection on the customer connector mating half are connected to the power s...

Страница 44: ...Connect the parallel control and monitoring To make the connections for the parallel control and monitoring use an applicable mating half not supplied CAUTION BACK EMF SUPPRESSION DIODE Risk of damag...

Страница 45: ...relay of up to 24 V d c coil rating up to 20 mA 3 To monitor the fail status output connect the customer control equipment to the fail output pin 7 and to the pin 2 of the customer logic interface ma...

Страница 46: ...control on page 43 and Figure Logic interface connections RS485 serial control on page 43 In given configuration the PC is the serial link master and the pump is the slave The distance over which the...

Страница 47: ...electrical supply 3 Fuse 4 nEXT pump logic interface 4 7 2 Serial enable To send a serial message over the serial link activate the serial enable To activate the serial enable link the serial enable...

Страница 48: ...command message sent will receive a response that follows status code or data return The pump accepts one message at a time The pump will only accept a new message when the response to the previous me...

Страница 49: ...diagram for multi drop connection using RS232 interface 1 RS232 interface on control equipment 2 Buffer 3 pump 4 OR gate 1 RS232 interface on control equipment 2 Buffer 3 pump 4 OR gate Page 45 B8520...

Страница 50: ...s as follows a valid start character character for a store operation or character for a query operation followed by a command an upper case alphabetical character followed by an object number has thre...

Страница 51: ...cimal hex RPS flags Measured motor speed System status word Vent options S853 0 0 decimal Hard vent only when 50 speed S853 1 Controlled vent if 50 speed or hard vent if 50 speed 2 Hard vent if stop o...

Страница 52: ...o full speed Set target speed to standby speed Timer options S870 S870 0 1 1 decimal Timer disabled Timer enabled Note that the timer is permanently enabled on ramp up Analogue signal options S871 S87...

Страница 53: ...ASCII character r Returned error code Refer to Table Summary of commands that can be sent to the nEXT pump on page 47 sp space character string can have several ASCII characters X multi drop decimal A...

Страница 54: ...to control the pump At the same time you can use the serial interface or the USB service port using the manufacturer s nST PC software to monitor different pump parameters Alternatively you can use t...

Страница 55: ...stem OK 5 Optional LED indicator normal speed 6 Current limit resistor for LED 7 Optional serial link selector 8 pump 9 Optional voltmeter 10 Optional serial enable switch 11 Optional standby switch 1...

Страница 56: ...ernative valve connected to the vacuum system on page 54 4 9 1 Manual vent valve A manual vent valve is supplied with the pump Do not open the manual vent valve too quickly as it is not possible to pr...

Страница 57: ...the electrical connection instructions given in the Accessories Manual supplied with the TAV valve and refer to Figure Controller connector showing pin numbers on page 30 3 Connect the connector into...

Страница 58: ...TAV solenoid valve can be operated from the TIC Refer to the TIC Instruction Manuals for more information 4 9 4 Alternative valve connected to the vacuum system If you use different vent valve make s...

Страница 59: ...troller or Turbo Controller Air cooling accessories are available for the pump refer to Accessories on page 92 Install the air cooler as given in the instruction manual supplied with it If you use an...

Страница 60: ...ity of the cooling water supply If necessary do the treatment and filtration 1 Connect the cooling water supply to the water cooler at the pump Use one of the two push fit connectors on the water cool...

Страница 61: ...sary commands to configure the motor controller Use manufacturer s TIC Turbo and Instrument Controller or TIC Turbo Controller Refer to Configuring the nEXT pump using a TIC on page 62 for more inform...

Страница 62: ...s follows Reply S 8 5 3 sp r cr The permanently enabled fan setting is now stored in the memory of the pump When the pump is shipped it is set up to operate a vent valve Send a query that follows to f...

Страница 63: ...command To change the standby speed setting using a serial command send the command that follows characters d shows the value as a percentage of full rotational speed Command S 8 5 7 sp d d d cr The...

Страница 64: ...emory of the pump To check what timeout period is set send a query as follows Command S 8 5 4 cr The reply will be as follows Reply S 8 5 4 sp d d cr The timer is permanently enabled during ramp up It...

Страница 65: ...1 sp d cr The analogue output signal setting is now stored in memory of the pump To check which analogue output signal setting is enabled send a query as follows Command S 8 7 1 cr The reply will be a...

Страница 66: ...and multi drop message protocol To check the multi drop address of the pump send the query as follows using wild card address 99 which means any node Command 9 9 9 9 S 8 5 0 cr The reply will be as fo...

Страница 67: ...ls for information on how to do the settings Note You cannot configure the Analogue Output Options using the TIC You cannot assign a multi drop address to the pump with TIC Option is available to conn...

Страница 68: ...pump Close the vent valve before you start the backing pump When you use the controller to control a TAV solenoid valve and operate with parallel control and monitoring you cannot close the valve bef...

Страница 69: ...andby control input from the 0 V control reference on the logic interface connector 6 2 3 Stop the pump To stop the pump disconnect the start stop control input from the 0 V control reference on the l...

Страница 70: ...e selected to suit the application 6 3 3 Standby speed If the pump operates at less than or more than the standby speed it will accelerate or decelerate until standby speed is reached To operate the p...

Страница 71: ...d cr Here first number shows the voltage measured in 0 1 Volts i e divide the number by 10 to get the answer in Volts second number shows the current measured in 0 1 Amps third number shows the motor...

Страница 72: ...rallel standby control and fail indication are disabled Serial communications are disabled RS485 Standby and fail lines are used for RS485 data Standby and fail lines are in RS485 high impedance state...

Страница 73: ...bo Controller can be found on CD ROM part number D39700879 which is supplied with the TIC or TIC Turbo Controller 6 6 Decelerating and venting Switch off the backing pump immediately after applying th...

Страница 74: ...data on page 17 for maximum permitted inlet pressure 6 7 2 Operation at high temperatures Temperature sensors in the pump mechanism and electronics are monitored by an internal system If the system d...

Страница 75: ...l the vent valve if installed As the rotational speed of the pump decreases the power generated from the motor also decreases until it is no longer able to keep power to the logic interface or LEDs Th...

Страница 76: ...ored before the timer period expires the pump will speed up to designated speed If the timer period expires the controller will go into fail condition and will display flashing error code 3 As above w...

Страница 77: ...6 8 Bakeout nEXT200200 split flow pumps are not applicable for bakeout Page 73 B85200880_D Operation...

Страница 78: ...en in the sections that follows The inlet screens inlet strainer and inlet flange seals are available as spares Refer to Spares on page 91 7 2 Bearing and oil cartridge maintenance Replace the oil car...

Страница 79: ...rnal pump components Do not use abrasive materials to clean the pump parts If the inner side of the pump is contaminated it cannot be possible to get the necessary ultimate vacuum performance or the p...

Страница 80: ...or both on page 78 No serial comms on page 78 Fail signal or standby signal not working on page 79 Yellow service LED is flashing a repeated sequence on page 79 The red alarm LED is on on page 79 The...

Страница 81: ...rease cooling water flow or decrease the water temperature or do both Check that external heat sources such as system bakeout heaters are not excessive Cause The rotor does not rotate freely Remedy Th...

Страница 82: ...llows or a vibration isolator in the backing line Cause The noise is irregular and increasing Remedy A defective bearing Contact us or the supplier Cause The pump makes a constant high pitched noise R...

Страница 83: ...LED is on at other times restart the system upgrade the software if restarting the system does not correct the fault Fault The red alarm LED is flashing Cause A fail condition has activated Remedy No...

Страница 84: ...follows Reply V 8 8 1 sp h h h h h h h h cr The service status word is made up of 8 hexidecimal digits To decode this word convert each digit into a 4 digit binary number as described in Decoding sys...

Страница 85: ...or less than 1 hour per hour Decreased pump temperature is the primary factor in extending the controller life 8 4 Pump run time The run hours and recommended service time of the impeller in the pump...

Страница 86: ...ts continuously or shows a flashing sequence If the error light is on continuously this shows a problem with the embedded software Restart the system If restarting the system does not clear the fault...

Страница 87: ...ple fail conditions For example error flash code sLssLs signifies error 2 controller failed internal configuration and calibration operation and error 5 pump internal measurement system disconnected o...

Страница 88: ...16 status flags are reserved by us Binary digits 0 0 1 0 0 0 1 0 1 0 0 0 0 0 1 1 0 0 0 0 0 0 0 0 0 0 1 0 0 0 1 0 3 1 3 0 2 9 2 8 2 7 2 6 2 5 2 4 2 3 2 2 2 1 2 0 1 9 1 8 1 7 1 6 1 5 1 4 1 3 1 2 1 1 1...

Страница 89: ...example Indication 0 0 The pump has not failed 1 1 The pump is at rest 2 0 Speed is below normal speed 3 0 The vent valve is open 4 0 There is no active start command 5 1 Serial enable is active 6 0 S...

Страница 90: ...signated full speed of the pump in revolutions per second Reply S 8 5 1 sp String 1 String 2 String 3 cr Send the query that follows to find out the boot loader software version Command S 8 6 8 cr The...

Страница 91: ...2 Put the pump in its packing materials Seal the pump in a plastic bag with a applicable desiccant for fastest pump down when the pump is put back into service 3 Store the pump in cool dry conditions...

Страница 92: ...tlets are capped off before disposal Dispose of the pump components and accessories safely and in accordance with all local and national safety and environmental requirements Be careful from the compo...

Страница 93: ...your equipment to us for service or for any other reason you must send us a completed Declaration of Contamination of Vacuum Equipment and Components Form HS2 The HS2 form tells us if any substances f...

Страница 94: ...follows and service parts are available Table 29 Service tool kits Service tool kit Item number Oil cartridge tool kit B80000812 Bearing tool kit B80000805 Table 30 Service kits Service kit Item numbe...

Страница 95: ...ge seals and integrated inlet screens The pumps are supplied with an inlet seal The Item Numbers of replacement seals are given in Table Inlet flange seals and integrated inlet screens on page 91 Tabl...

Страница 96: ...tor 10 Manual vent valve fitted 1 VRX vent restrictor 2 TAV solenoid vent valve 3 Purge plug fitted 4 PRX purge restrictor 5 DN10NW adaptor 6 WCX water cooling accessory 7 ACX nEXT air cooler axial 8...

Страница 97: ...ctance and is applicable for larger vacuum systems with volume more than 10 litres Table 36 TAV vent valve and vent port adaptor Product Orifice Diameter Item Number TAV5 vent valve 0 5 mm B58066010 T...

Страница 98: ...rge restrictor to the pump Table 39 PRX purge restrictor Item Item Number PRX10 purge restrictor B58065001 13 9 C clamp adaptor kit The NW25 exhaust and booster port of the pump can be removed and rep...

Страница 99: ...TIC PC program is a PC based software that can be used to retrieve and set the user configurable parameters in the pump TIC PC program enables monitoring and data logging of the pumping system Page 95...

Страница 100: ...edwardsvacuum com...

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