Edwards nEXT200200, Инструкция по эксплуатации

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2. Introduction
The units used in the manual conform to the SI international system of units of
measurement where applicable US equivalent units of measurement are given. When
flow rates are specified, the abbreviation 'sccm' is used to mean standard cubic
centimetres per minute. This is a flow of 1 cm
3
min
-1
at an ambient temperature of 0 °C
and a pressure of 1013 mbar (1.013 x 10
5
Pa).
2.1 Overview
WARNING: SAFE EQUIPMENT USE
Risk of injury or damage to equipment. Improper use of the equipment could cause
damage to it or injury to people. The user is responsible for the safe operation,
installation and monitoring of the system.
WARNING: ELECTROLYTIC
Risk of asphyxiation. The drive contains electrolytic capacitors and, under certain
fault conditions, may emit dangerous fumes. Ensure that the drive is operated in a
well-ventilated area.
CAUTION: ELECTRICAL CONNECTIONS
Risk of damage to equipment. Do not attempt to separate the controller from the
pump since this will cause damage to the electrical connections.
A nEXT pump has a turbomolecular pump with a permanently attached controller which
has drive electronics.
The controller controls the electrical supply to the pump with the exception of standby
speed control. The controller has no manual controls and can be operated through the
logic interface only. To operate the nEXT pump, connect it to the customer control
equipment and to the power supply or use the manufacturer's TIC Turbo Instrument
Controller or TIC Turbo Controller.
The controller drives the brush-less d.c. motor in the pump. Three variants of the nEXT
pump are:
▪ The 'S' or 'Simplex' variant which has turbomolecular blades.
▪ The 'D' or 'Duplex' variant which has turbomolecular blades and a drag mechanism
that allows operation at higher backing pressures than the pure turbomolecular
pumps.
▪ The 'T' or 'Triplex' variant which has turbomolecular blades, a drag mechanism and
a regenerative mechanism. The regenerative stage gives the option to utilise
'boost' mode.
An 'iD' or 'iT' interstage variant gives an interstage port between the turbomolecular
blades and drag mechanism.
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B85200880_D - Introduction