Edwards nEXT200200, Инструкция по эксплуатации

Страница: 82 / 100

Remedy Clean the high vacuum system.
Cause Check the system for leaks and contamination.
Remedy If a leak is found, repair it and clean the contamination.
Cause The inlet pressure is less.
Remedy
• Remove the pump from the system and test the ultimate pressure of the pump
only.
• Check the pump for contamination.
Do the leak test of the pump. If the leak rate more than
1x10
-7
mbar l s
-1
(1x10
-5
Pa l s
-1
), contact us or the supplier.
Fault The pump is very noisy or there is excessive vibration or both
Cause The rotational speed of the pump is same as the resonant frequency of the attached
system.
Remedy Change the natural frequency of the system or isolate the pump using flexible bellows.
Cause The vibration is transmitting from the rotary backing pump.
Remedy Install a flexible bellows or a vibration isolator in the backing line.
Cause The noise is irregular and increasing.
Remedy A defective bearing. Contact us or the supplier.
Cause The pump makes a constant high pitched noise.
Remedy The rotor is out of balance. Contact us or the supplier.
Fault No serial comms
Cause No electrical supply, loss of serial link.
Remedy Check that:
• the electrical supply is on.
• the serial link is connected.
• the serial enable line is active.
Cause Slide switch is not in the correct position for RS232 or RS485.
Remedy Check that:
• the electrical supply is on.
• the serial link is connected.
• the serial enable line is active.
• Left for RS485, right for RS232.
• Right for parallel control and monitoring.
Cause Incorrect baud rate and node address.
Remedy Check baud rate and, if operating in multi-drop mode, the node address matches those
of the pump.
Cause Check that the red light is not on or flashing.
Remedy If LED is on, check the red alarm LED symptoms.
Page 78
B85200880_D - Fault finding