READ CAREFULLY BEFORE USING THIS
MANUAL
Introduction
This machine grinds silicon wafers (hereinafter called wafers) and, therefore, has rotary sections which
rotate at high speed, high-voltage sections which present electric shock hazard and drive sections which
may catch operating personnel’s body and clothing.
If the machine is not properly operated, safety hazards that could result in serious injury or death may
occur.
Read before using the machine
In using this machine, thoroughly read this manual and follow the instructions set forth in it.
To assure safety in operating and maintaining the machine, it is important that you know the locations of
the potential safety hazards. It is difficult for DISCO to predict each and every potential hazard.
However, this manual carries various precautionary notes and warnings wherever the presence of any
safety hazard is foreseeable. For increased safety assurance, therefore, it is essential that you observe all
the precautions and other relevant instructions set forth in this manual.
If you modify the machine without prior consent of DISCO or repair it in a manner not stated in this
manual, the safety assurance features of the machine may be seriously affected.
Never attempt to modify or repair the machine in a manner not approved by DISCO.
Scope of responsibility
DISCO shall not be responsible for any accident due to any of the following events:
・
Any parts other than the genuine DISCO brand are mounted onto the machine.
・
Any parts other than periodic replacement or consumable parts are replaced without prior consent
of DISCO.
・
Any parts designed by the customer are mounted onto the machine without prior consent of
DISCO.
・
Equipment of another manufacturer is added to the machine.
・
The machine or part of the machine is transported, reused, resold or modified.
If the customer refuses to disclose the names and contents of the process materials or piping parts used for
the machine as trade secret or confidential commercial information, DISCO may not be able to carry out
repair or maintenance on the machine for protection of the safety and health of our technical personnel.
Parts replacement
When you replace any parts other than periodic replacement or consumable parts described below, consult
your nearest DISCO office. If they are replaced without consulting DISCO, DISCO shall assume no
liability for the consequences arising therefrom.
・
Operation Manual
・
Maintenance Manual
・
When specified in a separate document (e.g., Technical news letter, Operation guide)
