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Introduction-2

Unit notation

International System of Unit is adopted to express any unit. Also, all the pressure values are expressed in
gauge pressure.

Notation of part number

In this document, the part numbers are shown as follows.

XXXX-XXXXXX-X (YYYYYYYY--Y)

New style part no.

Former style part no.

Содержание DAG810

Страница 1: ...rm or by any means without the express written permission of DISCO Also this document may not be disclosed or transferred to third parties UJUSNE 003F This document is printed on recyclable Lint Free...

Страница 2: ...rance features of the machine may be seriously affected Never attempt to modify or repair the machine in a manner not approved by DISCO Scope of responsibility DISCO shall not be responsible for any a...

Страница 3: ...n question a critical situation in which either critical injury or death is very likely to result This symbol is used for the incident in which the injury is critical and there is high probability of...

Страница 4: ...blade or flange until the spindle comes to a complete stop Do not open the grinding section side cover until the spindle comes to a complete stop It takes approximately 70 seconds for the spindle to s...

Страница 5: ...electrically charged sections Before performing maintenance work make sure to shut off the machine power and lock out the breaker WARNING Even if the power circuit breaker of the machine is turned of...

Страница 6: ...ualified person who has completed DISCO s machine maintenance training to engage in maintenance of the machine Data maintenance personnel Qualified person to manage the software data of the machine Op...

Страница 7: ...tem of Unit is adopted to express any unit Also all the pressure values are expressed in gauge pressure Notation of part number In this document the part numbers are shown as follows XXXX XXXXXX X YYY...

Страница 8: ...B 1 1 Machine Installation B 2 1 1 Hoisting and Lowering the Machine B 4 1 2 Transferring the Machine B 9 1 3 Leveling the Machine B 12 1 4 Installation of Machine Anchors Optional Accessory B 14 1 5...

Страница 9: ...ne B 42 1 14 Supply Air Pressure Check B 44 1 15 Wheel Coolant Flow Check B 45 1 15 1 Air Purge B 46 1 15 2 Wheel Coolant Supply Condition Check B 49 1 16 Spindle Coolant Flow Check B 50 2 Machine Rel...

Страница 10: ...nts 1 Machine Specifications Specifications of DAG810 2 Dimensions and Mass of Machine on Delivery Dimensions and mass of the machine upon delivery 3 Environmental Conditions Environmental requirement...

Страница 11: ...ents The leakage current 15 mA or less If you use an earth leakage protective breaker at the plant facility side choose one ready for higher harmonic waves and whose sensed current is 30 mA or higher...

Страница 12: ...20 to 25 C the maximum permissible hourly temperature variation is 2 C Displacement 4 to 6 m3 min at the duct hose connection port of the machine main body when the static pressure is as below indicat...

Страница 13: ...through the selected route Information At least a space of approximately 610 mm wide is necessary for a person to work sitting The status indicator 335 mm and other protrusions are not included in th...

Страница 14: ...Space Installation drawing of the machine with required space indications 3 2 Environmental Conditions for Installation Environmental conditions required for installing the machine 3 3 Environmental C...

Страница 15: ...changes Maintenance space for spindle replacement requires at least 2 700 mm from the floor to the ceiling The maintenance area is described with the recommended values that are based on SEMI S8 Inst...

Страница 16: ...control unit and UPS optional accessories are used is shown UPS water temperature control unit vacuum unit Unit mm 1 The booster pump optional accessory is incorporated into the vacuum unit 2 The duct...

Страница 17: ...y temperature variation 2 C max Spindle coolant water quality If water used is high in chlorine Cl iron Fe copper Cu or sodium Na content or has high electrical conductivity mechanical parts corrosion...

Страница 18: ...ed or kept in the environment where dirt and dust float around precision parts of the machine may be worn out or get dirty quickly which could shorten the part life or adversely affect processing and...

Страница 19: ...is recommended that the machine is secured with these anchors Avoid places where noise vibration heat or oil mist is generated or near the fans and ventilation openings Drain water from the machine be...

Страница 20: ...ing Diagram Summary of this section Section No Title Contents 4 1 Rear Panel Connection Ports Piping and wiring connections on the machine rear panel 4 2 Piping and Wiring Diagram Piping and wiring di...

Страница 21: ...t 1 3 5 12 14 DAG810 Vacuum unit Duct unit 1 3 5 12 13 14 DAG810 Spindle coolant supply unit 1 2 8 12 20 23 DAG810 Vacuum unit Spindle coolant supply unit 1 2 5 12 14 20 23 DAG810 Vacuum unit Duct uni...

Страница 22: ...ided hose 25 ID 33 OD Rc3 4 2 18 Water temperature control unit DTU152 tank water drainage Braided hose 25 ID 33 OD Rc3 4 2 19 Water temperature control unit DTU152 drain pan drainage Braided hose 15...

Страница 23: ...Joint Rc1 4 x 1 Joint Rc3 8 x 1 Duct port x 1 200VAC 3 phase Maximum power 12 kVA Rated current 30 A Power cable x 1 Gas Air Liquid Water Drain water mist containing grinding dust or silicon debris A...

Страница 24: ...OCATION OF MACHINE Contents of this chapter Section No Title Contents 1 Machine Installation Procedures to install the machine Procedures to adjust the installed machine 2 Machine Relocation Procedure...

Страница 25: ...he Machine 1 3 Leveling the Machine 1 4 Installation of Machine Anchors Optional Accessory 1 5 Piping Connection 1 6 Power Cable Connection 1 7 Connection of Power Cables of Uninterruptible Power Supp...

Страница 26: ...of the machine DISCO provides the optional machine anchors for human equipment protection in case of an earthquake or other disaster The floor on which the machine is installed should be provided with...

Страница 27: ...910074 0 MOENJ074 2 SLING B SLING LENJ 910038 0 MOENJ038 A 4 HOISTING JIG Front HOISTING JIG LJUJ 910005 0 MOJUJ005 2 HOISTING JIG Rear HOISTING JIG LJUJ 910006 0 MOJUJ006 2 Cautions in hoisting and...

Страница 28: ...having inadequate strength they may break and cause the machine to lose balance and fall thereby severely injuring or killing persons nearby or damaging the machine Check to make sure that the retaini...

Страница 29: ...oping or uneven floor it may topple and cause severe personal injury or death Procedures to hoist and lower the machine Step No Procedure 1 Wear the safety shoes and protective gloves 2 Check the dedi...

Страница 30: ...machine as shown in the figure below For the machine front use 2 shackles at each side Machine front view Sling B Sling A Hosting jig Shackle A Shackle B Hook Shackle A Hook Detailed drawing of shack...

Страница 31: ...t the employed crane is rated for a hoisting load of 2 000 kg or heavier and withstands the machine weight boom length and hoisting angle 6 Unload the machine Slowly lower the machine so as not to sho...

Страница 32: ...t properly centered on the forklift it may fall causing severe personal injury or death The mass of the machine is approximately 1 300 kg When transferring the machine by forklift make sure that the g...

Страница 33: ...machine installation process do not position your feet or hands under the machine If the machine should fall off the forklift they may be caught or cut off by the machine CAUTION Before transferring...

Страница 34: ...ure that the 6 adjuster feet at its bottom are equal in height 3 Insert the fork of the forklift under the machine Check to be sure that the gravity center of the machine is on the center of the fork...

Страница 35: ...urface is flawed it may adversely affect the machine s grinding accuracy Step No Procedure Continued from the previous section 1 Check to make sure that there is no dust or any other dirt observed on...

Страница 36: ...wer than the others and raise that adjuster foot If the level gauge moves accurate measurement results cannot be expected Never touch the level gauge until leveling of the machine completes 7 If the g...

Страница 37: ...made by the user Allen wrench 5 mm 6 mm Adjustable wrench Anchor bolt M16 4pcs Procedures to install machine anchors Step No Procedure Continued from the previous section 1 Referring to the figure bel...

Страница 38: ...your skin or you inhale its vapor it could cause serious illness or death It may also corrode the machine and invoke abnormal movements Make sure to use the air and water hoses supplied as accessories...

Страница 39: ...lation or maintenance it may cause an accident or machine failure CAUTION A hose or hard piping line between the machine exhaust duct port and the facility exhaust system such as duct unit must be pro...

Страница 40: ...hose or hard piping line between the machine drain port and the plant side drain inlet must be inclined to prevent water from remaining its interior If water stays in the hose or hard piping line wat...

Страница 41: ...ng system diagram Main air supply Facility Machine main body Vacuum unit Duct unit Booster pump DTU152 Optional accessory Lockout must be made at the plant facility side Wheel coolant water supply Whe...

Страница 42: ...o the flange pipe may cause the pipe to break Step No Procedure Continued from Section1 4 1 Liberally apply silicone sealant to the outer surface of the drain duct hose and exhaust duct hose as well a...

Страница 43: ...Procedure 3 Connect the cuffed hose onto the flange pipe of the drain port exhaust port and secure the connection section with a hose band Cuff Hose band Flange pipe 4 Allow the silicone sealant to h...

Страница 44: ...angle using a dedicated tool for the purpose If you use a hose having an improperly cut edge for connection it may cause leaking of air or water from the connection section leading to bursting of the...

Страница 45: ...n Continued Step No Procedure 3 Fasten the nut to the joint by rotating it clockwise using a wrench Make sure to securely fasten the nut so that the hose does not rotate 4 Check looseness of connectio...

Страница 46: ...the operation steps indicated below 1 6 1 Power Cable Installation to Machine Main Body 1 6 2 Connection of Power Cable of Vacuum Unit Optional Accessory 1 6 3 Connection of Power Cable of Booster Pu...

Страница 47: ...Duct unit power Duct unit signal Booster pump unit power Booster pump unit signal Coolant unit power Coolant unit signal DTU152 power DTU152 signal Facility Machine main body Vacuum unit Duct unit Boo...

Страница 48: ...mpliance with the following specifications The cable should also comply with the applicable standards of the area the machine is installed Power cable specification Rated voltage AC 600 V Size AWG8 Nu...

Страница 49: ...16 mm2 Al should be prepared Using a nonstandard power cable may cause an electric shock that could lead to a serious injury or death The power cable for this machine is prepared as an optional access...

Страница 50: ...the facility side power is shut off and locked out 3 Draw the power cable into the control box rear of the machine through the cable gland on the top of the control box Machine rear view Cable gland...

Страница 51: ...able L1 L2 L3 lines to the breaker terminal block and tighten the screws of the breaker terminal block with the specified torque 3N m L1 L2 L3 8 Replace the terminal block cover back into the initial...

Страница 52: ...bottom part of the control box Earth bar Terminal for connection E No 50 2 Connect each power line of the vacuum unit power cable to the corresponding terminals on the terminal block TB2 Make sure to...

Страница 53: ...the booster pump unit power cable to the earth bar located at the bottom part of the control box Earth bar Terminal for connection E No 51 2 Connect each power line of the booster pump unit power cabl...

Страница 54: ...n 1 Connect the PE line of the duct unit power cable to the earth bar located at the bottom part of the control box Earth bar Terminal for connection E No 14 2 Connect each power line of the duct unit...

Страница 55: ...bottom part of the control box Earth bar Terminal for connection E No 52 2 Connect each power line of the coolant unit power cable to the corresponding terminals on the terminal block TB2 Make sure t...

Страница 56: ...ect the signal cables of the water temperature control unit to the machine Step No Procedure Continued from the previous section 1 Connect the signal lines of the water temperature control unit DTU152...

Страница 57: ...jumper wires the power lines will short circuit and cause heat or fire when the UPS power is turned ON Procedures to connect the power lines of the uninterruptible power supply unit to the machine Ste...

Страница 58: ...ure Terminal block TB1 Terminals for connection AC Input LINE side J901 No 1 AC Input NEUTRAL side J901 No 2 AC Output LINE side J902 No 3 AC Output NEUTRAL side J902 No 4 4 Connect the signal line J1...

Страница 59: ...f the machine Z axis see Section 1 8 1 Y axis see Section 1 8 2 1 8 1 Removal of Z axis Retainer Jig Equipment you must have ready Allen wrench 5 mm Procedures to remove the Z axis retainer jig from t...

Страница 60: ...ainer jig from the machine Step No Procedure Continued from the previous section 1 Remove the Y axis retainer jig red from the machine To remove the retainer jig you should first remove the 4 hexagon...

Страница 61: ...stall the machine outer covers Step No Procedure Continued from the previous section 1 Install the status indicator into the hole on the machine top cover and then install a nut from under the cover a...

Страница 62: ...B 39 Procedures to install the machine outer covers Continued Step No Procedure 3 Install all the machine outer covers Cover lock Cover retaining screw Continued in the next section...

Страница 63: ...rocedure Continued from the previous section 1 Unlock the air valve at the plant facility side 2 Open the air valve 3 Locate the air unit at the left of the Z axis as shown in the figure below to make...

Страница 64: ...side is shut OFF and locked out If you come into contact with a live part of the machine while the facility side power is turned ON you may receive an electric shock that could result in severe injur...

Страница 65: ...ard which could result in death or serious injury Even when the machine power is turned off it will remain energized until the facility power source is turned OFF Step No Procedure Continued from the...

Страница 66: ...s describe below may occur to shut off the machine power C0556 A failure occurs in the vacuum pump C0501 A drop in main air pressure is detected Machine power shuts OFF If such errors occur at the sta...

Страница 67: ...er 2 Check to make sure that the indicated value on the pressure sensor main air is 0 5 MPa Pressure sensor main air Air unit If the indicated value is not 0 5 MPa make adjustment using the regulator...

Страница 68: ...B 45 1 15 Wheel Coolant Flow Check Operation flow 1 15 1 Air Purge 1 15 2 Wheel Coolant Supply Condition Check...

Страница 69: ...The interlock mechanism is deactivated when you operate a machine unit on the UNIT OPERATION screen Make sure to keep your fingers and hands away from the movable sections and operation space of the m...

Страница 70: ...B 47 Air purge procedures Continued Step No Procedure 2 Enter the set up user password and then press The following screen appears 3 Press The following screen appears...

Страница 71: ...ears 5 Press The water flow air blow system of the chuck table turns ON 6 Keep the water flow air blow system turned ON for 2 to 3 minutes to expel air from the vacuum pump and water hoses 7 Press The...

Страница 72: ...dure Continued from the previous section 1 Press The following screen appears 2 Press The wheel coolant system turns ON 3 Check the wheel coolant flowmeter to make sure that no bubbles are generated i...

Страница 73: ...r shown in the figure below at the left side of the machine Remove this cover Spindle coolant flowmeter Left side 2 Check to make sure that the flow rate of spindle coolant water is 1 5 L min or highe...

Страница 74: ...of Machine Outer Covers 2 4 Installation of Retainers for Machine Transportation 2 5 Piping and Wiring Disconnection 2 6 Machine Transfer Hoisting and Lowering the Machine Refer to Section 1 1 of thi...

Страница 75: ...or ship it is necessary to drain the water hoses of the machine If the machine is transported without draining the hoses it may fail or break due to freezing or leaking of water remained in them NOTIC...

Страница 76: ...by DISCO Customer Engineers Water purge Before transporting the machine by truck or ship it is necessary to drain the water hoses of the machine Ask DISCO customer engineers for draining work when you...

Страница 77: ...le wrench Procedures to remove the machine outer covers Step No Procedure Continued from the previous section 1 Check to make sure that power supply is shut off and the air and water valves are closed...

Страница 78: ...dicator from the machine top cover Disconnect the connector J318 of the status indicator Loosen the nut retaining the status indicator under the cover and then screw off the status indicator to remove...

Страница 79: ...ke sure to install the retainer jigs to the Y axis and Z axis If you transport the machine without securing these movable components in their positions it may take a great deal of time later to readju...

Страница 80: ...mm Procedures to install the Y axis retainer jig Step No Procedure Continued from the Section2 3 1 Remove the cover shown in the figure below Remove this cover 2 Install the Y axis retainer jig red w...

Страница 81: ...ures to install the Z axis retainer jig Step No Procedure Continued from the previous section 1 Open the grinding section side cover L Z axis grinding section side cover L 2 Install the Z axis retaine...

Страница 82: ...ty side power is shut OFF 2 Check to make sure that the air and water valves are closed at the plant facility side 3 Disconnect the machine power cable at the plant facility side Make sure to disconne...

Страница 83: ...of retainer jig Y axis B 57 Z axis B 58 Installation of retainers for machine transportation B 56 Installation space A 6 L Leveling the machine B 12 M Machine installation B 2 Machine relocation B 51...

Страница 84: ...86 21 50278018 Fax 86 21 50278178 DISCO HI TEC TAIWAN CO LTD 1F No 188 Baoqiao Rd Xindian Dist New Taipei City Taiwan R O C Phone 886 2 2913 8877 Fax 886 2 2913 2525 DISCO HI TEC SINGAPORE PTE LTD Sin...

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