Brooks On-Board 8, Инструкция по установке и обслуживанию

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 4-5
Figure 4-1: Decontamination Flowchart (continued)
Run coldhead motor for
10 - 30 seconds and
turn motor OFF.
Have you
performed 5
motor drive
cycles?
Yes
No
Verify that the coldhead
has the correct helium
static charge.
Disconnect 5 foot flexlines
from the decontaminated
coldhead.
Connect helium SUPPLY
line at coldheads on same
manifold.
Connect helium RETURN
line at coldheads on same
manifold.
Adjust compressor helium
static pressure to the
correct value.
Restart a Full
regeneration cycle.
Cool On-Board GLE
Cryopump to below 17K.
Repeat Steps 10 - 16 for
each coldhead being
contaminated
Step
12d
Step
13
Step
14
Step
15
Step
16
Step
18
Step
17
Step
20
Step
21
From Page 4-4
Restart Compressor
Step
19
Back To Page 4-4