Brooks On-Board 8, Инструкция по установке и обслуживанию

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4-14 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Figure 4-4:
TO CONNECT
Hold here using 1.0 inch wrench
Turn here using 1 3/16 inch wrench
Hold here using 1 1/8 inch wrench
Turn here using 1 3/16 inch wrench
COUPLING HALVES
TO DISCONNECT
COUPLING HALVES
Proper Helium Line Coupling Disconnection/Connection
On-Board GLE Cryopump Cleaning
Cleaning the arrays or other interior surfaces of the On-Board GLE
Cryopump vacuum vessel is seldom required because dust buildup does
not affect performance, and the special copper alloy cryo-condensing
arrays are nickel plated for corrosion resistance.
If you wish to clean the arrays and other interior surfaces, follow the
procedures below.
1. Confirm that an adequate supply of indium gasket material, P/N
7100001G006, is available to replace gaskets inadvertently
WARNING
If the On-Board GLE Cryopump has been used to pump toxic or dangerous materials, you
must take adequate precautions to safeguard personnel.