Brooks On-Board 8, Инструкция по установке и обслуживанию

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4-4 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Figure 4-1: Decontamination Flowchart
Cool On-Board GLE
Cryopump(s) until
temperature is stable for a
minimum of 30 minutes.
Purge regulator, helium
charging line, and
maintenance manifold with
99.999% pure helium.
Disconnect helium
SUPPLY line at coldheads
on same manifold.
Immediately
disconnect helium RETURN
line at coldheads on same
manifold.
Immediately
shut down the On-Board
GLE Cryopump(s).
Warm the
On-Board GLE
Cryopump(s) to 300K.
Shut down
compressor
Slowly open ball valve on
maintenance manifold
and depressurize the
coldhead to 30 - 50 psig.
Back-fill coldhead to the
correct static helium
pressure and close Hoke
valve.
Have you
pressurized and
depressurized
5 times?
Yes
No
Go to Page 4-6
Slowly open ball valve on
maintenance manifold
and depressurize the
coldhead to 30 - 50 psig.
Back-fill coldhead to the
correct static helium
pressure.
Step
1
Steps
2,3,4
Step
5
Step
6
Steps
7
Step
8
Step
9
Step
11
Step
12a
Step
12b
Step
12c
Step
12d
Connect two 5 foot flexlines to
the maintenance manifold
and the first On-Board GLE
Cryopump to be
decontaminated.
Step
10
From Page 4-5