Brooks On-Board 8, Инструкция по установке и обслуживанию

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-11
cold head operation. When cold head operation reaches a steady-state
condition, further pressure regulation is unnecessary.
A typical On-Board 8 GLE Cryopump system is shown in Figure 1-3 .
The location of helium and electrical components of typical flat and
straight On-Board 8 GLE Cryopumps are shown in
Figure 1-6 and Figure
1-7 respectively.