Brooks On-Board 8, Инструкция по установке и обслуживанию

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 2-1
Section 2 - Installation
Introduction
Installation information is presented for experienced and non-experienced
On-Board GLE Cryopump system technicians. The flowchart in
Figure 2-
1 highlights the major tasks of On-Board GLE Cryopump installation.
Refer to Figure 2-1 and the appropriate installation procedure within this
section for the type of On-Board GLE Cryopump being installed.
Figure 2-1: Block Diagram for On-Board GLE Cryopump Installation
On-Board GLE Cryopump
Installation
(Refer to Page 2-2)
Roughing Pump
Connection
(Refer to Page 2-3)
Purge Gas Connection
(Refer to Page 2-3)
AUX TC Gauge
Installation
(Refer to Page 2-4)
Setpoint Relays
(Refer to Page 2-4)
Remote
Keypad/Display Installation
(optional)
(Refer to Page 2-6)
Vent Pipe Connection
(Refer to Page 2-2)
Helium Line
Connections
(Refer to Page 2-4)
Rough Valve Gas
Connection
(Refer to Page 2-3)