Brooks On-Board 8, Инструкция по установке и обслуживанию

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1-16 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Figure 1-8:
2
3
4
5
17
18
19
16
1
1. Thermocouple Gauge
2. Rough Pump Connection
3. Air Supply Connection
(60 - 80 psig 1/8 NPT)
4. Purge Gas Connection
(10 - 25 psig or 40 - 80 psig 1/8 NPT)
5. Auxiliary Thermocouple Gauge Connector
6. On-Board Network Pump Identification Switch
7. On-Board Network Connector
8. Power Conditioning Module
9. Status LED
13
10
9
6
8
7
15
10. RS-232 Computer Interface Connector
11. Module Power Indicator Lamp
12. RS-232 Computer Interface Connector
13. Relays Connector
14. Remote Keypad/Display Connector
15. On-Board Module Safety Interlock Screw
16. Input Power Connector
17. Pressure Relief Valve
18. Helium Return Connector
19. Helium Supply Connector
LEGEND
12
11
14
STATUS
RS-232
RELAYS
24V, 1 A
RS-232
REMOTE
AUX TC
NETWORK
Typical On-Board 8 Cryopump Component Identification