Brooks On-Board 8, Инструкция по установке и обслуживанию

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-9
Theory of Operation
Each On-Board GLE Cryopump consists of a cold head and a vacuum
vessel as shown in
Figure 1-4 or Figure 1-5 . An 80K condensing array, a
15K array, cold head station heaters, and an 80K radiation shield are
located in the vacuum vessel. The cold station heaters and 15K array are
secured to the cold head, which is welded to the vacuum vessel. The cold
Table 1-2: On-Board 8F GLE Cryopump Specifications
Parameter Specifications
Input Power 208 VAC 50/60 Hz
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Keypad/Display
Roughing Valve
Purge Valve
Cryopump TC Gauge
1st Stage Diode
2nd Stage Diode
1st Stage Heater
2nd Stage Heater
2 Setpoint Relays
RS-232 Interface
Pumping Speeds:
Water
Air
Hydrogen
Argon
4000 liters/sec
1500 liters/sec
2500 liters/sec
1200 liters/sec
Argon Throughput 700 sccm (9 torr-liters/sec)
Capacity:
Argon
Hydrogen
1000 std. liters
17 std. liters @ 5 x 10
-6
torr
Crossover 150 torr-liters
Cooldown Time 2 hours nominal
Dimensions Refer to Installation/Interface Drawing
Weight 60 lbs.