Brooks On-Board 8, Инструкция по установке и обслуживанию

Страница: 14 / 56

1-4 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Power Conditioning Module Option
The Power Conditioning Module (PCM) provides power to the On-Board
GLE Cryopump from a customer provided 208 VAC, 50/60 Hz, single
phase power source. The PCM provides constant 3 phase 60 Hz power to
the On-Board GLE Cryopump regardless of input AC line voltage and
frequency fluctuations. The PCM is typically mounted under the
On-Board 8 GLE Cryopump Module to minimize the space required for
installation.