Brooks On-Board 8, Инструкция по установке и обслуживанию

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 4-3
These gaseous contaminants can be removed by first freezing them in the
coldhead, then disconnecting the helium supply and return lines, warming
the coldhead followed by de-pressurizing and pressurizing the helium gas
in the coldhead to remove them. The use of this decontamination
procedure will return most On-Board GLE Cryopumps to proper operation
without the need for removal of the On-Board GLE Cryopump from the
tool.
NOTE: It is strongly recommended that this procedure be performed as
soon as possible after the ratcheting noise appears to minimize mechanical
loading on the On-Board GLE Cryopump drive mechanism.
NOTE: If any additional help is needed, refer to Appendix A in this
manual for the location of the nearest CTI-CRYOGENICS Customer
Support Center.
Equipment/Tools Requirements
The following tools and equipment must be available to perform this
decontamination procedure. If you do not have this equipment, refer to
Appendix A and call your local Customer Support Center to order the
equipment needed.
NOTE: For best results, CTI-CRYOGENICS suggests the use of a dedicated helium bottle, which
regulator and charge line which are never separated.
Table 4-2: Decontamination Tools and Equipment
CTI-CRYOGENICS
Part Number
Description Quantity
8080250K003 Maintenance Manifold Kit 1
7021002P001 Charging Hose 1
8043079G060 5 Ft. Flexlines
(or longer)
2
- Ultra Pure Helium (99.999%) -
571716 1.0 Inch Self Sealing Coupling Wrench 1
571717 1 1/8 Inch Self Sealing Coupling Wrench 1
571718 1 3/16 Inch Self Sealing Coupling Wrench 1
8080015K001 Keypad/display 1
8031403 0-400/0-3000 psig Regulator 1