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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide

©2013 Brooks Automation Inc.

Pub. No. 8040564, Rev. AA, 01/15/13

ECO No. 64541

1-15

Figure 1-7:

80K ARRAY

MOUNTING

RADIATION SHIELD

SECOND STAGE

15K ARRAY

VACUUM VESSEL

FIRST STAGE
HEATER

HEATER

FLANGE

STANDPIPE
FILTER

FIRST STAGE DIODE

Cutaway View of a Typical On-Board 8 GLE Cryopump Vessel

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Содержание On-Board 8

Страница 1: ...On Board GLE Cryopump Installation and Maintenance Instructions 8040564 Revision AA...

Страница 2: ...pTrak Marathon Marathon 2 Marathon Express Micro Ion MiniConvectron On Board Polycold Razor Simplicity Solutions the Simplicity Solutions logo Stabil Ion TrueBlue TurboPlus Vision Zaris and the Brooks...

Страница 3: ...Module Option 1 6 Remote Operation Option 1 7 Specifications 1 8 Theory of Operation 1 9 Cold Head 1 10 Vacuum Vessel and Arrays 1 10 Compressor Gas and Oil Flows 1 10 Section 2 Installation Introduct...

Страница 4: ...4 10 Method 1 Decontaminate All Cryopumps 4 10 Method 2 Decontamination of Only Cold Cryopumps 4 11 Method 3 Grouped Decontamination using Manifold 4 11 On Board GLE Cryopump Cleaning 4 14 Appendix A...

Страница 5: ...pump Vessel 1 13 Figure 1 6 Typical Flat On Board 8 GLE Cryopump Component Identification 1 14 Figure 1 7 Cutaway View of a Typical On Board 8 GLE Cryopump Vessel 1 15 Figure 1 8 Typical On Board 8 Cr...

Страница 6: ...This Page Left Intentionally Blank...

Страница 7: ...e 1 1 On Board 8 GLE Cryopump Specifications 1 8 Table 1 2 On Board 8F GLE Cryopump Specifications 1 9 Table 3 1 Cryopump Troubleshooting Procedures 3 2 Table 3 1 Troubleshooting Procedures continued...

Страница 8: ...This Page Left Intentionally Blank...

Страница 9: ...cates a potentially hazardous situation or unsafe practice If not avoided the action may result in minor or moderate personal injury or equipment damage A CAUTION is highlighted in yellow CAUTION A si...

Страница 10: ...contain safety shapes which have specific safety meanings The following table shows some of the safety shapes used in this document and their meanings References For more information about safety stan...

Страница 11: ...ty of system or process contamination from the On Board Cryopump is eliminated Installation Operation and Maintenance Instructions On Board 8 GLE Cryopump Installation Operation and Maintenance Instru...

Страница 12: ...1 2 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 GLE Cryopump for a complete description of the numerous operational functions that are available...

Страница 13: ...ressor Operation Installation and Maintenance Guide 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 3 Figure 1 1 ON BOARD 8F CRYOPUMP ON BOARD 8 CRYOPUMP On Board 8 and On Boa...

Страница 14: ...r to the On Board GLE Cryopump from a customer provided 208 VAC 50 60 Hz single phase power source The PCM provides constant 3 phase 60 Hz power to the On Board GLE Cryopump regardless of input AC lin...

Страница 15: ...8600 Compressor Operation Installation and Maintenance Guide 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 5 Figure 1 2 On Board 8F GLE Cryopump with PCM PCM ON BOARD 8F GLE...

Страница 16: ...t computer The On Board Vacuum Network Controller Module is typically mounted on either side of the On Board 8 GLE Cryopump Module to minimize the space required for installation Refer to the On Board...

Страница 17: ...d in multiple On Board 8 GLE Cryopump process tools is to network the On Board 8 GLE Cryopumps using the BITBUS protocol In this configuration the networked On Board 8 GLE Cryopumps are managed as a g...

Страница 18: ...alve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS 232 Interface Pumping Speeds Water Air Hydrogen Argon 4000 liters sec 1500 lit...

Страница 19: ...the vacuum vessel The cold Table 1 2 On Board 8F GLE Cryopump Specifications Parameter Specifications Input Power 208 VAC 50 60 Hz Rough Pump Connection NW 25 ISO KF Integrated Hardware Keypad Display...

Страница 20: ...ore exiting through the helium gas return connector and returning to the compressor Helium expansion in the displacer regenerator assembly provides cooling at the first and second stage cold stations...

Страница 21: ...11 cold head operation When cold head operation reaches a steady state condition further pressure regulation is unnecessary A typical On Board 8 GLE Cryopump system is shown in Figure 1 3 The locatio...

Страница 22: ...01 15 13 ECO No 64541 Figure 1 4 Typical On Board 8 GLE Cryopump System WATER COMPRESSOR POWER VACUUM HELIUM RETURN HELIUM SUPPLY CRYOPUMP POWER 208 VAC 50 60 Hz 208 VAC 50 50 Hz STATUS RS 232 9600 C...

Страница 23: ...uide 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 13 Figure 1 5 80K ARRAY MOUNTING RADIATION SHIELD SECOND STAGE 15K ARRAY VACUUM VESSEL FIRST STAGE HEATER HEATER FLANGE CU...

Страница 24: ...2 On Board Network Connector 3 On Board Network Pump Identification Switch 4 Auxiliary Thermocouple Gauge Connector 5 Remote Keypad Connector 6 Helium Return Connector 7 Helium Supply Connector 8 Rou...

Страница 25: ...ooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 15 Figure 1 7 80K ARRAY MOUNTING RADIATION SHIELD SECOND STAGE 15K ARRAY VACUUM VESSEL FIRST STAGE HEATER HEATER FLANGE STANDPIPE FILT...

Страница 26: ...Switch 7 On Board Network Connector 8 Power Conditioning Module 9 Status LED 13 10 9 6 8 7 15 10 RS 232 Computer Interface Connector 11 Module Power Indicator Lamp 12 RS 232 Computer Interface Connec...

Страница 27: ...to Figure 2 1 and the appropriate installation procedure within this section for the type of On Board GLE Cryopump being installed Figure 2 1 Block Diagram for On Board GLE Cryopump Installation On Bo...

Страница 28: ...generation Install the On Board GLE Cryopump on the vacuum system as follows 1 Remove the protective cover from the main flange of the On Board GLE Cryopump 2 Clean all sealing surfaces and install th...

Страница 29: ...and at each On Board GLE Cryopump to successfully utilize On Board FastRegen capability Connect your On Board GLE Cryopump to a roughing pump system using a roughing line with the largest inside diame...

Страница 30: ...supply and return line identification decals CTI CRYOGENICS supplied to their respective connectors Verify proper helium supply static pressure as described in the Installation Section of the appropr...

Страница 31: ...appropriate On Board Module Programming and Operation Instructions for instructions on programming the setpoint relays 1 Determine whether your On Board equipment requires setpoint relay contacts to...

Страница 32: ...o a rack and then connect it to the REMOTE connector on the On Board GLE Cryopump Module using the cable supplied with the remote keypad The On Board GLE Cryopump can be operated both from the remote...

Страница 33: ...w the Hi Vac valve cryopump Leak checking below the Hi Vac valve should be performed with the On Board GLE Cryopump shut off and at room temperature Leak checking while the On Board GLE Cryopump is op...

Страница 34: ...arrays is loose thereby preventing good thermal contact with its cold station on the cold head Warm the cryopump to ambi ent temperature and retighten the arrays to 15 20 inch pounds High base pressur...

Страница 35: ...ave fully cleaned the adsorbing array Partial pres sures of non condensables hydrogen neon or helium may remain Regenerate the cryopump as described in the appropriate On Board Module Pro gramming and...

Страница 36: ...This Page Left Intentionally Blank...

Страница 37: ...ro Three methods of decontamination are described in Table 4 1 and on the following pages These methods all have isolating gaseous contamination in common by freezing them in one or more cold On Board...

Страница 38: ...mp is cooled down then contaminated helium is the most probable cause All gases other than helium can freeze in the coldhead During manufacturing of On Board GLE Cryopump systems gaseous impurities ar...

Страница 39: ...If any additional help is needed refer to Appendix A in this manual for the location of the nearest CTI CRYOGENICS Customer Support Center Equipment Tools Requirements The following tools and equipmen...

Страница 40: ...On Board GLE Cryopump s to 300K Shut down compressor Slowly open ball valve on maintenance manifold and depressurize the coldhead to 30 50 psig Back fill coldhead to the correct static helium pressure...

Страница 41: ...correct helium static charge Disconnect 5 foot flexlines from the decontaminated coldhead Connect helium SUPPLY line at coldheads on same manifold Connect helium RETURN line at coldheads on same mani...

Страница 42: ...its performance may already be affected by contamination Close the high vacuum valves to isolate the On Board GLE Cryopumps from the vacuum chamber After Step 1 has been completed all of the coldhead...

Страница 43: ...ium bottle regulator and charge line which are never separated Once Step 4 has been completed all of the coldheads have been cooled and the gaseous contaminant frozen in the coldhead The maintenance m...

Страница 44: ...enerate each On Board GLE Cryopump to be decontaminated by pressing the REGEN button followed by 1 then 2 on the Network Terminal keypad b When the pumps reach 300K discontinue the regeneration cycle...

Страница 45: ...with helium to the correct static charge pressure by adjusting the regulator to the required pressure and opening the Hoke valve on the manifold Close the Hoke valve when the pressure is correct b De...

Страница 46: ...harge pressure NOTE Refer to the appropriate Compressor Installation Operation and Maintenance Instructions for the correct static helium charge pressure value and adjustment procedure NOTE The chargi...

Страница 47: ...Board GLE Cryopumps where they will be frozen In this method the following Steps replace the corresponding Steps in Method 1 Step 1 Method 2 Any On Board GLE Cryopumps on the same manifold which are...

Страница 48: ...the tool Step 10 Method 3 Verify that the compressor is off Connect the two 5 foot helium flexlines to the maintenance manifold and the compressor side of the common supply and return manifold Steps...

Страница 49: ...040564 Rev AA 01 15 13 ECO No 64541 4 13 Cryopumps are decontaminated Figure 4 3 Helium Flex Line Connection Helium Pressure Gauge Ball Valve 99 999 Helium Connection Helium ON OFF Hoke Valve Relief V...

Страница 50: ...other interior surfaces of the On Board GLE Cryopump vacuum vessel is seldom required because dust buildup does not affect performance and the special copper alloy cryo condensing arrays are nickel p...

Страница 51: ...face of the vacuum vessel the 80K condensing array and the 80K radiation shield as follows a Wash each item in strong soap or detergent solution and hot water b Rinse the items in clean hot water c Ai...

Страница 52: ...This Page Left Intentionally Blank...

Страница 53: ...home page Guaranteed Up Time Support GUTS For 24 hour 7 day per week Guaranteed Up Time Support GUTS dial 800 367 4887 Inside the United States of America 508 337 5599 Outside the United States of Ame...

Страница 54: ...This Page Left Intentionally Blank...

Страница 55: ...system 1 1 O Oil flows and compressor gas 1 10 On Board 8 GLE Cryopump Installation operation and maintenance 1 1 specifications 1 8 On Board GLE Cryopump description 1 1 installation 2 1 maintenance...

Страница 56: ...2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 Index 2 This Page Left Intentionally Blank...

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