Alcatel Vacuum Technology Adixen ATH 1300 M, Руководство пользователя

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B 80
Electrical connection
1/7
GB 00738 - Edition 10 - Januar
y 03
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
B 80
Make sure that main switch is off during
electrical connection. Danger, risk of electric
shock: disconnect main power source and heater
power prior to servicing (if heater is used,
max. 110/230 V, 300 W, 50/60 Hz).
Study the preliminary precautions (See B 10).
WARNING
All the internal electrical connections required for
use the pump are made prior shipment.
However, the electrical connection of the main
power supply may be provided by the process
tool. An out of phase condition is corrected
automatically by the controller.
WARNING
An IEC 417#5019 symbol is located on the rear
panel.
WARNING
The pump doesn't have any internal overcurrent
protection, so it is required to power the pump
from a facilities supplied main circuit breaker
rated 10 A minimum, and which has a minimum
amp. interrupting current of 10 000 AIC.
WARNING
This pump is not equipped with an emergency
stop EMO device because it is designated for use
on process tools and integration with the process
tool EMO.
Check that the pump is correctly connected to the equip-
ment emergency stop system.
WARNING
An internal input contact can be used to signal a
roughing pump power failure (see B 91).
This will stop the turbomolecular pump avoiding overpres-
sure risk in the pump.
CAUTION!
WARNING