Alcatel Vacuum Technology Adixen ATH 1300 M, Руководство пользователя

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Contents
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
User’s Manual
ATH 1300 M/MT - 1600 M/MT
GB 00721 - Edition 12 - Januar
y 04
1/2
Introduction
Start-up
■
Introduction to the ATH 1300 M/MT -
1600 M/MT and associated ACT controller . . .
■
The pump operating principle . . . . . . . . . . . .
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Pump overview . . . . . . . . . . . . . . . . . . . . .
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ACT 1300 M controller. . . . . . . . . . . . . . . . .
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The accessories . . . . . . . . . . . . . . . . . . . . .
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The technical characteristics . . . . . . . . . . . . .
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Certificate of compliance SEMI S2-93 A . . . . .
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Safety instructions . . . . . . . . . . . . . . . . . . . .
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Unpacking and storage . . . . . . . . . . . . . . . .
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Pump connections to an installation . . . . . . . .
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Inlet and exhaust connections . . . . . . . . . . . .
■
Air inlet valve connection (option) . . . . . . . . . . .
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Nitrogen purge device connection . . . . . . . . .
■
Water cooling connection . . . . . . . . . . . . . . .
■
Heating band connection . . . . . . . . . . . . . . .
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Electrical connections . . . . . . . . . . . . . . . . . .
■
«Dry contacts» connector wiring . . . . . . . . . .
■
«Inputs/Outputs» connector wiring . . . . . . . . .
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«Rem.» connector wiring . . . . . . . . . . . . . . .
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RS 232 or RS 485 serial link wiring . . . . . . . .
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Detailed description of RS commands . . . . . . .
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A 10
■
A 20
■
A 30
■
A 40
■
A 50
■
A 60
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A 70
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B 10
■
B 20
■
B 30
■
B 31
■
B 40
■
B 50
■
B 60
■
B 70
■
B 80
■
B 90
■
B 91
■
B 100
■
B 110
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B120