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Alcatel Vacuum Technology Adixen ATH 1300 M, Руководство пользователя

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G 10

Pumping curves

Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT

GB 00760 - Edition 02 - September 99

2/2

Inlet pressure (Pa)

Inlet pressure (mbar)

Flow rate
(sccm)

1

10

100

1000

10000

10

-3

10

-4

10

-2

1

10

-1

10

1

10

-1

10

-2

1

10

1

10

3

10

2

Flow rate versus inlet pressure

Gas : N

2

Upper limits
for continuous operation

ATH 1300 M, DN 200
ATH 1600 M, DN 200

Содержание Adixen ATH 1300 M

Страница 1: ...ATH 1300 1600 M MT MAGLEV HYBRID TURBOMOLECULAR PUMPS User s Manual...

Страница 2: ...whole host of experienced subsidiaries distributors and agents The first step was the founding of Alcatel Vacuum Products Hingham MA in the United States thirty years ago reinforced today by 2 others...

Страница 3: ...olume and weight Smart and compact electronic controller Reliability Maintenance free Battery free Easy integration Dear Customer You have just purchased an Alcatel maglev hybrid turbo pump We would l...

Страница 4: ...G100 of this Manual These Directives are amended by Directive 93 68 E E C E C Marking Copyright Intellectual property The use of Alcatel products are subject to copyright and intellectual property rig...

Страница 5: ...ristics Certificate of compliance SEMI S2 93 A Safety instructions Unpacking and storage Pump connections to an installation Inlet and exhaust connections Air inlet valve connection option Nitrogen pu...

Страница 6: ...ilure to observe instructions could result in injury or death WARNING Safety instructions Controller start up Configuring the controller for the application Controlling the pump using the controller f...

Страница 7: ...matic balancing system Lowest possible levels of noise and vibration Compensation for any imbalance of the rotor Maintenance free Inert gas purge Eliminate corrosion of the motor and magnetic bearing...

Страница 8: ...tically detects and operates the ATH 1300 M MT or ATH 1600 M MT Convenient interface Handy keyboard Alphanumeric display Modern pump monitoring Monitoring of testing and troubleshooting parameters RS...

Страница 9: ...aged turbomolecular pump with a spiral helix molecular drag section to enhance ultra high vacuum UHV and ultra clean technology UCT The turbomolecular section provides high pumping speeds and UHV ulti...

Страница 10: ...bearing type ACTIDYNE maglev bearing S2M Patent The mobile rotor has five axes of freedom monitored by 5 active bearings Rotor Stator Bearing Electronics Power amplifiers Reference signal Detector sig...

Страница 11: ...gs They are never used in normal operation since the rotor is not in contact with the bearings The back up bearings are only used to protect the pump in accidental air in rushes accidental shocks or p...

Страница 12: ...id turbo pump in an installation At the pump exhaust the gases are evacuated to atmosphere by a primary pump Since the ATHM compression ratio is set by the design the ATHM limit pressure is given by t...

Страница 13: ...excellent protection for corrosive applications In high pressure and high throughtput processes such as metal etch deposit can build up in the lower compression stages of the rotor leading the pump t...

Страница 14: ...le to optimize pumping characteristics according to each customer application for example high pressure pumping A distinction is made between the following speeds reduced speed STANDBY speed which can...

Страница 15: ...new generation of ACT controller family Dimension 1 2 Rack Weigth 8 5 kg 18 lb All functions to monitor the ATHM are integrated into the controller START STOP STATUS STAND BY ENTER PREVIOUS ACT 1300 M...

Страница 16: ...s connector Wiring instructions on B 91 7 Grounding 1 6 5 7 2 3 4 to replicate the monitoring parameters available in the form of dry contacts selectable 0 10 Volts output for speed pump current or te...

Страница 17: ...e vacuum in the chamber while the pump is reset to atmospheric pressure Air inlet valve and cable This valve will slow down the pump in complete safety With this option the braking time from nominal s...

Страница 18: ...h P N 1 m 104624 3 5 m 103719 5 m 103720 10 m 103721 15 m 104587 20 m A214574 Length P N 1 m 110 V A328698A 3 5 m 110 V A328698B 5 m 110 V A328698C 10 m 110 V A328698D 15 m 110 V A328698E 20 m 110 V A...

Страница 19: ...missible pressure at exhaust mbar 1 5 Maximum flowrate with N2 heated SCCM 1000 Maximum flowrate with N2 unheated SCCM 3000 Purging maximum flow rate SCCM 50 Pressure with 100 SCCM flow mTorr mbar 1 1...

Страница 20: ...CT 1300 M PREVIOUS ENTER STAND BY STATUS STOP FAULT START CG Centre de gravit CG 96 Model characteristics ACT 1300 M Weight 8 5 kg Dimensions HxWxD mm 132 5 x 219 x 453 1 2 Rack 19 Power supply Nomina...

Страница 21: ...F F DN 160 ISO K DN 160 CF F ASA 6 E 12 12 16 20 12 22 4 19 H 202 4 199 4 199 4 209 4 245 2 257 6 239 4 I 278 8 275 8 275 8 285 8 321 6 334 0 315 8 J 299 3 296 3 296 3 306 3 342 1 354 5 336 3 K 278 3...

Страница 22: ...ISO K DN 200 CF F ASA 6 E 16 16 12 26 16 12 20 19 H 199 4 199 4 199 4 210 9 199 4 199 4 225 9 239 4 I 285 8 285 8 285 8 297 3 285 8 285 8 312 3 325 8 J 306 3 306 3 306 3 317 8 306 3 306 3 332 8 346 3...

Страница 23: ...Technology France User s Manual ATH 1300 M MT ATH 1600 M MT 5 5 Out 1 8 NPT female For 1 4 ext diam tube For 1 4 ext diam tube DN 16 ISO KF In 1 8 NPT female 66 30 14 29 25 25 55 62 5 28 68 5 66 74 9...

Страница 24: ......

Страница 25: ...1 1 GB 00729 Edition 01 January 01 A 70 Alcatel Vacuum Technology France User s Manual ATH 1300 M MT ATH 1600 M MT Certificate of compliance SEMI S2 93 A...

Страница 26: ......

Страница 27: ...ut into doubt the EMC electromagnetic compatibility performance and the safety of the product ALCATEL declines any responsibility for such operations CAUTION This pump is not equipped with an emergenc...

Страница 28: ...use on tables make sure that no objects enter the ventilation openings or block the openings when handling the units When switching off an item of equipment containing loaded capacitors at over 60 VD...

Страница 29: ...of 1 bar in relation to the atmospheric pressure The leaktightness of the products is guaranteed when they leave the factory for normal operating conditions It is the user s responsibility to maintai...

Страница 30: ...lt can be cleared It is required to switch power off and on to clear the fault WARNING The machines are designed so as to prevent any thermal risk to the user s safety However specific operating condi...

Страница 31: ...cal shocks in case of contact It advices to disconnect the pump before any intervention or to properly lock out and tag out the equipment breaker before any intervention on the pump WARNING HAZARDOUS...

Страница 32: ......

Страница 33: ...d to the risk of tilting during product handling instal lation and operation refer to A60 for the location of the center of gravity for pump and controller WARNING Unpack the equipment carefully and k...

Страница 34: ...roller storage The accessories The controller The pump Connection for air inlet valve and nitrogen device Inlet Exhaust Pump storage WARNING Can cause muscle strain or back injury Use lifting aids and...

Страница 35: ...kinetic energy stored in a maglev turbopump is very high In case of a mechani cal failure an improperly installed pump could be ejected from the equipment if the kinetic energy was transferred to the...

Страница 36: ...is placed close to the turbo pump and if it has high stiffness the impact can create a high axial load on the system Such axial force has not been observed on a standard pendulum valve The impact of...

Страница 37: ...el Unit ATH 1300 ATH 1600 Nominal speed rpm 34000 39000 Energy kNm 60 76 Torque Max KNm 23 30 Duration ms 1 3 2 5 Delay ms 1 5 2 1 Bending moment Max KNm 17 21 Duration ms 0 7 1 3 Delay ms 0 0 Axial f...

Страница 38: ...tor crash This rotation could damage the foreline and the purge gas line which would generate hazards for the user WARNING For safety reasons it is important to tighten the bolts with a torque wrench...

Страница 39: ...equipment attachment devices the flange dimensions the quality and the number of bolts No reducing adaptator or bellows should be installed between pump inlet flange and the chamber Equipment install...

Страница 40: ...B 30 Alcatel Vacuum Technology France User s Manual ATH 1300 M MT ATH 1600 M MT Pump connections to an installation 6 6 GB 00733 Edition 10 February 03 The pump can operate in any position In In In In...

Страница 41: ...groove bottom all over its circumference Remove the protective parts blocking the inlet exhaust and purge openings these components prevent foreign bodies from entering the pump during transport and s...

Страница 42: ...valve ACT Dry Contacts 1 2 Secondary isolation valve ATH V2 It is recommended to install an isolation valve between the chamber to be pumped and the pump inlet to maintain the pressure in the chamber...

Страница 43: ...he back up bearings Connect this valve such as an Alcatel bracket valve as near the pump exhaust as possible depending on the space available and the accessories installed Connect the valve to the pri...

Страница 44: ......

Страница 45: ...reased If the venting time is setted the reset to atmospheric pressure takes place when the pump is stopped or when faults are registered on the controller see C 50 Air inlet valve is delivered with a...

Страница 46: ...as to be fixed to the grounding fixation on the ACT rear panel ATH N2 V3 Air inlet valve 10 9 Air inlet It is also possible to connect another valve on the AIR INLET contact on the Dry Contact connect...

Страница 47: ...Oil 0 1 ppm Absolute pressure of 1 to 1 5 bar The nitrogen purge must be connected directly to the pump exhaust port Connect the nitrogen supply to the DN 16 purge fitting The nitrogen flow reduction...

Страница 48: ...accessory Long nipple Flow reduction device Air inlet valve 1st case Purge can be stopped during pump running 1 4 connector 1 4 connector Flow reduction device Air inlet valve Purge connection with ai...

Страница 49: ...nitrogen purge throughout pumping according to the flow rate and pressure values in the scale given To limit the flow rate at 25 SCCM connect the nitrogen flow reduction device accessory see A 50 When...

Страница 50: ......

Страница 51: ...using a 13 mm flat wrench to maintain it water leak risk CAUTION In order to limit the corrosion and clogging of the cooling pipes it is recommended to use cooling water with the following characteri...

Страница 52: ...ature is regulated by a sensor integrated into the pump see B 70 Temperature is regulated by the controller Protective earthing instruction The grounding wire of the water valve cable has to be fixed...

Страница 53: ...r line main with ground connection Water valve cable Water valve grounding cable For thermostated MT models Connection These pumps are equipped with an heating band a thermal sensor and a valve to reg...

Страница 54: ...STAT contact on the DRY CONTACTS connector and to the power line 110 or 230 VAC The heater cable 110 or 230 V see A 50 must be choosen in function of the power supply 110 or 230 V The temperature can...

Страница 55: ...of phase condition is corrected automatically by the controller WARNING An IEC 417 5019 symbol is located on the rear panel WARNING The pump doesn t have any internal overcurrent protection so it is...

Страница 56: ...by customer see B 110 and B 120 Delayed fuses x2 located below the controller 16A T 250V see F 10 Electrical grounding of controller frame M5 for EMC accordance Connect the RS 485 serial link to this...

Страница 57: ...the main index on the pump connector 2 Then identify the main index on the cable connector 3 Insert the connector in accordance to the main index and then press the bayonet type connector axially int...

Страница 58: ...the two screws attached to the controller before plug ging the connector If you fail to remove the 2 screws you will not be able to insert the connector fully that may cause electrical damage to the...

Страница 59: ...mble the two small screws that you had previously disassembled and check that the surfaces are in contact with the ACT Secure manually the 2 screws Don t used a screwdriver Caution If the two surfaces...

Страница 60: ...1300 M MT ATH 1600 M MT Main power connection At the rear of the controller Check that the seal is available on the controller connector Identify the main index Identify the main index on the female H...

Страница 61: ...thermostatic option In this installation we use V1 Primary isolation valve K1 ATH 7 8 6 5 4 3 8 7 2 1 Isolation Valve Water valve 12 VDC Air valve 12 VDC Thermostat Start Customer relay Dry contacts I...

Страница 62: ......

Страница 63: ...ng on temperature parameter 1 Isol valve 1 2 The contacts are opened or closed depending on the pump temperature and the selected temperature Thermostat 5 6 11 12 Air inlet 9 10 The voltage delivered...

Страница 64: ......

Страница 65: ...e controller DB 44 contacts female connector The inputs are considered to be activated if the AC or DC voltage applied is between 5 and 30 Volts fig 1 15 1 30 28 27 25 24 16 17 18 44 41 38 37 36 35 34...

Страница 66: ...ulse or a permanent action is applied on this input When the input is disabled the motor is stopped by impulse or by permanent action Restart the pump as follows desable Remote start valid Remote stop...

Страница 67: ...control the primary pump The ACCELERATING contact is closed when the motor is in acceleration phase with a speed over 400 rpm It remains closed until the setted speed is reached The ACCELERATING conta...

Страница 68: ......

Страница 69: ...8 15 Analog output signal The signal is transmitted between terminal 8 and 15 of the remote connector Four values can be used to plot curves Pump rotation speed 360 rpm OV to 60000 rpm 10V Pump tempe...

Страница 70: ......

Страница 71: ...see C 30 The default configuration of the serial link is as follows Type RS 232 Transmission speed 9600 bauds Data length 8 bits Parity NONE Stop bit 1 Refer to C 30 to customize the parameters RS232...

Страница 72: ...ser s Manual ATH 1300 M MT ATH 1600 M MT Rem connector wiring 1 2 3 4 5 9 10 11 12 6 7 8 14 13 15 RS485 V RS485 V Multiple RS485 serial link several units up to 999 can be controlled on a single link...

Страница 73: ...nd executed correctly Err0 adjustment error out of bounds Err1 command error syntax Err2 parameter error e g non hexadecimal character Err3 context error Err4 checksum error Specifies the address of t...

Страница 74: ...ive Supervisor the software version x the software edition zz Returns the state of the parameters defined by SET adrLEV10 CR LF adr nnnnn sssss 00000 0 ccccc eeeee ddddd pppp qqqq jj kk lll mmm Return...

Страница 75: ...s nominal value Used to select possible user choices adrOPT01 n CR LF choice of parameters on the analog output n 0 real pump speed n 1 pump current n 2 temperature of pump body n 3 temperature of int...

Страница 76: ...Resets the stand by speed to its Standby stored value and allows it to be modified if an RPM command is sent This configuration is automatically stored in user memory List all the data titles and dat...

Страница 77: ...ot used b Returns buzzer choice b 0 whithout b 1 whith r Returns remote choice r 0 remote mode off r 1 remote mode on adr OK Defines the character which separates the parameters in a reply adrSEP nnn...

Страница 78: ...enting max 3559 s that is 59 mn 59 s adrSET15 qqqq CR LF venting time max 3559 s that is 59 mn 59 s adrSET30 jj CR LF speed threshold for relay 3 to 50 adrSET31 kk CR LF control temperature 30 to 75 C...

Страница 79: ...verheat W02 mot overheat W03 mot control W12 power volt W13 pow current W20 bearing W21 act temp W22 pump temp W28 eeprom write D00 seized pump D04 hall sensor D05 overc sensor D06 ext safety D11 mag...

Страница 80: ...M MT TIT Syntax TMP Syntax Result List the data titles adrTITAI CR LF List analog inputs adrTITLI CR LF List logical inputs adrTITLO CR LF List logical outputs Defines the operating state of the turb...

Страница 81: ...ATH pump an isolation valve between the ATH pump and the backing pump WARNING The machines are designed so as not to present a thermal risk for the user s safety However specific operating conditions...

Страница 82: ......

Страница 83: ...ion used to access the parameter setting mode used to exit the various menus without validating the functions used to move in the menus or from one parameter to another used to select or adjust the va...

Страница 84: ...logy France User s Manual ATH 1300 M MT ATH 1600 M MT Enter the sub menus by pressing Configure the parameters for the application using the various menus DISPLAY SETUP Display and or select the param...

Страница 85: ...EMOTE SET ANALOG OUT STANDBY SPEED AUTO STARTING BUZZER TEMPERATURE UNIT THERMOSTAT RELAY SPEED SET SERIAL LINK SET START DELAY TIME TO VENTING VENTING TIME BEARINGS LIMITS BEARINGS PUMP TIME NEW CODI...

Страница 86: ...mission speed Parity Data length Number of STOP bits Data separating character Number of controller in a multiple link Default Setting values values 9600 bauds 1200 2400 4800 9600 None None Even Odd 8...

Страница 87: ...nology France User s Manual ATH 1300 M MT ATH 1600 M MT GB 00747 Edition 05 January 04 3 3 Number of controller in a sequence in the case of the multiple link 0 0 to 255 ADDRESS RS 232 RS 485 N E T W...

Страница 88: ......

Страница 89: ...ined value see C 30 The rotation speed monitoring indicator light goes off The pump motor is no longer powered the pump decelerates Yellow lit Standby mode selected Start up the pump by pressing Stop...

Страница 90: ...C 1 50A ACT 36 C 34000 S T A T U S S T A T U S FAULT WARNING BEARING S T A T U S S T A T U S FAULT WARNING BEARING Pump and controller status pump temperature pump motor current controller temperatur...

Страница 91: ...levitated The heating band is powered for ATH MT The primary pumps starts and valve V1 opens if the primary pumping is controlled by the controller If the pump start up time has been programmed see C...

Страница 92: ...e primary isolation valve V1 and the primary pump stops If the ISV contact is connected V2 closes The braking of the pump from maximum speed to 10000 rpm takes t 10 min Close the valve V2 1st case No...

Страница 93: ...e back up bearings without being damaged When the rotation speed reaches about 10000 rpm the controller display indicates Otherwise the minimum speed is reached before the power is restored ISOL VALVE...

Страница 94: ...mode operation The START STOP STANDBY commands are the same as those for the local mode REM XX H ACT XXXXX V3 XX ATH XXXXXX READY TO START The controller screen displays REM In the case of Remote mod...

Страница 95: ...or see B 91 is open the controller display indicates the pump is stopped and the air inlet valve opens if the air inlet valve parameter is setted To restart the pump closed the EXT SAFETY contact and...

Страница 96: ......

Страница 97: ...and memorize them There is no air inlet except if the venting time is on progress The actions on START STOP KEY or REM are desactivated This operation mode is always operational even on Local or Remo...

Страница 98: ......

Страница 99: ...it is designated for use on process tools In order to properly secure the pump for installation and maintenance it is required to properly lock out tag out the pump in accordance with OSHA requirement...

Страница 100: ...ings maintenance when needed Life time of these bearings depends on the duration and number of landing The initial percentage displayed by the controller is 100 When this percentage reaches 0 the pump...

Страница 101: ...the controller see page 7 Check that the cable linking the pump to the controller is correctly connected Otherwise contact the Customer Service Contact the Customer Service Contact the Customer Servic...

Страница 102: ...ps back below the authorized limit The controller temporarily stops driving the pump rotation until the temperature drops back below the authorized limit The controller temporarily stops driving the p...

Страница 103: ...nnected The pump can t restart No magnetic levitation The pump can t start The controller stops the motor it restarts if the defect disappears The controller stops the motor it restarts if the defect...

Страница 104: ...contact open The air inlet valve is activated if it is connec ted The pump can t restart Another landing on the bearings is possible The controller stops the motor The pump can t restart The controll...

Страница 105: ...the pump is stopped If the fault appears again contact the Customer Service Check that the power supply is present otherwise see D 20 7 8 Contact the Customer Service Contact the Customer Service Repl...

Страница 106: ...the Customer Service Change the cable link between the pump and the controller Contact the Customer Service Check that the pump is rigidly fixed to the frame Check that there are no vibrations on the...

Страница 107: ...doesn t close contact the Customer Service Install a gauge at the primary pump inlet and check its vacuum limit P 1 10 1 mbar ACT powered valve disconnected from the controller check the AIR INLET ou...

Страница 108: ...erature increases there is a leak on the water line Check that the THERMOSTAT contacts are closed Check the heating band power supply Contact the Customer Service Check that the water valve output is...

Страница 109: ...wing connection accessories Inlet port Exhaust port DN 40 ISO KF Purge port DN16 ISO KF Centering ring with DN 16 seal P N 068193 DN 40 clamping ring P N 083333 Standard connection accessories availab...

Страница 110: ...tall the pump under a suction hood It must remain there throughout the operation Purge inlet sweeping 2 Fit the DN 40 blank flange on the pump exhaust port Sweep with dry nitrogen for 10 minutes Stop...

Страница 111: ...uum Technology France User s Manual ATH 1300 M MT ATH 1600 M MT Shipping procedure for contaminated pumps 3 3 Pressurize the pump 3 Blank the inlet port Pressurize the pump with dry nitrogen to an abs...

Страница 112: ......

Страница 113: ...he regulations and affect the performance of the product and the user s safety Replacement of defective components with non genuine parts may jeopardize the safety conditions of the equipment As a res...

Страница 114: ......

Страница 115: ...2 V DC ACT 1300 M ACT 2300 M Description Fuse 6 x 32 T16A 250V Fuses for controllers Copper seals for pumps with CF F flanges Qty 2 Air inlet valve accessories Flange 10 sets of 1 part ATH ATH ATH typ...

Страница 116: ......

Страница 117: ...99 1 2 Inlet pressure Pa Inlet pressure mbar Pumping speed l s 0 500 400 300 200 100 900 1000 1100 1200 1500 1300 1400 800 700 600 10 5 10 4 10 3 10 6 10 2 10 1 101 1 10 4 10 3 10 2 10 1 1 101 103 10...

Страница 118: ...1600 M MT GB 00760 Edition 02 September 99 2 2 Inlet pressure Pa Inlet pressure mbar Flow rate sccm 1 10 100 1000 10000 10 3 10 4 10 2 1 10 1 101 10 1 10 2 1 101 103 102 Flow rate versus inlet pressu...

Страница 119: ...me of the gases or substances that have been in contact with the equipment pump or helium detector Biological pathogenic germs micro organisms bacteria viruses etc classes 1 to 4 and group E We are cu...

Страница 120: ...dentes Je confirme que seules les substances pr cis es ont t en contact avec l quipement sus mentionn et que les proc dures de pr paration d emballage et de transport ont t respect es You have replie...

Страница 121: ...G 100 1 1 GB 02326 Edition 01 January 04 Alcatel Vacuum Technology France User s Manual ATH 1300 M MT ATH 1600 M MT...

Страница 122: ......

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