Alcatel Vacuum Technology Adixen ATH 1300 M, Руководство пользователя

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A 30
Pump overview
1/2
GB 00725 - Edition 05 - Januar
y 04
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Standard version
ATH 1300 M
ATH 1600 M
Gas purge
ATH 1300 MT
ATH 1600 MT
The built-in heater band
Inlet
Gas purge
Exhaust
The
gas purge
provides excellent protection for corrosive
applications.
In high pressure and high
throughtput processes such
as metal etch, deposit can
build up in the lower
compression stages of
the rotor, leading the
pump
to early failure.
The built-in heater band
allows pump heating up to
75°C, which is sufficient to prevent the condensation
effect.
This device is thermally controlled by the ACT controller,
or by the customer’s external regulator.
The MT version is delivered with its water valve.