338
Chapter 6
Specifications
E5010C Spinstand Specifications
E5010C Spinstand Specifications
NOTE
E5010C is the obsolete product.
X-Y Stage (Coarse Positioning Stage):
Piezo Stage (Fine Positioning Stage):
Spindle:
Table 6-57
Stage Type:
Air Bearing, dual axis stage with vacuum lock down feature
Stage Travel :
140 mm
×
100 mm (5.5"
×
4")
Linear Scale Resolution:
100 nm (4
µ
")
Position Repeatability :
5
µ
m (200
µ
")
Position Accuracy:
15
µ
m (600
µ
") @ 23
±
1
°
C
Skew Range:
−
30
°
to +30
°
Table 6-58
Stage Type:
Piezo translator operated flexure substage
Stage Travel :
15
µ
m (600
µ
")
Travel Resolution:
1.7 nm (0.07
µ
")
Positioning Repeatability:
1.7 nm (0.07
µ
"), 1
σ
@
±
1
µ
m
Asynchronous Positioning Jitter:
1.7 nm (0.07
µ
"), 1
σ
@
≤
15,000 rpm
Table 6-59
RPM :
1,000 to 20,000 rpm
RPM Accuracy:
±
0.0005 % @ 15,000 rpm (typical)
RPM Jitters:
±
0.0025 % @ 15,000 rpm (typical)
Asynchronous Rotational Error:
1
µ
" axial/radial @ > 3,000 rpm
Rotational Direction :
CW, CCW
Clamp Size:
1.8”, 2.5”, 3.0/3.5"
Bearing:
Air Bearing
Motor:
Brushless DC, programmable
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