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Vacuum Gauge Controller AGC-100

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[1]

www.agilent.com
Operating Instructions
Inverted Magnetron Pirani Gauge FRG-700, FRG-702
tqna74e1
Agilent Technologies, Lexington, MA 02421, USA

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[2]

www.agilent.com
Operating Instructions
Bayard-Alpert Pirani Gauge FRG-720
tqna70e1
Agilent Technologies, Lexington, MA 02421, USA

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[3]

www.agilent.com
Operating Instructions
Bayard-Alpert Pirani Gauge FRG-730
tqna72e1
Agilent Technologies, Lexington, MA 02421, USA

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[4]

www.agilent.com
Operating Instructions
Pirani Standard Gauge PVG-500, PVG-502
tqna69e1
Agilent Technologies, Lexington, MA 02421, USA

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[5]

www.agilent.com
Operating Instructions
Pirani Capacitance Diaphragm Gauge PCG-750, PCG-752
tqna77e1
Agilent Technologies, Lexington, MA 02421, USA

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[6]

www.agilent.com
Operating Instructions
Pirani Standard Gauge PVG-550, PVG-552
tqna79e1
Agilent Technologies, Lexington, MA 02421, USA

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[7]

www.agilent.com
Operating Instructions
Capacitance Diaphragm Gauge CDG-500
tqna76e1
Agilent Technologies, Lexington, MA 02421, USA

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[8]

www.agilent.com
Operating Instructions
Compact Cold Catode Gauge IMG-500
tqna75e1
Agilent Technologies, Lexington, MA 02421, USA

D: Literature

Содержание AGC-100

Страница 1: ...Vacuum Products Division Vacuum Gauge Controller AGC 100 Operating Instructions Manual No tqna96e1 Revision February 2016 ...

Страница 2: ...Va AGC acuu C 100 um G Gaug ge Co Cop Ag ontro pyright 2016 gilent Inc oller ...

Страница 3: ......

Страница 4: ... Front panel 22 4 2 Turning the AGC 100 On and Off 23 4 3 Operating Modes 23 4 4 Measurement Mode 25 4 5 Parameter Mode 27 4 5 1 Switching Function Parameters 28 4 5 2 Gauge parameters 32 4 5 3 Gauge Control 40 4 5 4 General Parameters 42 4 5 5 Test Parameters 47 4 5 6 Data Logger Mode 50 4 5 7 Parameter Transfer Mode 52 5 Communication Protocol Serial Interface 54 5 1 Data Transmission 54 5 2 Com...

Страница 5: ...1 Connect the AGC 100 to a Network 86 C 2 Connect the AGC 100 to a Computer 87 C 3 Ethernet Configuration Tool 87 D Literature 90 ETL Certification 91 For cross references within this document the symbol XY is used for cross references to further documents and data sources the symbol Z ...

Страница 6: ...th A meplate Spec t applies to pro er Mod No based on firm es not work as the above firm e right to make are indicated r AGC 100 Agilent Techno imen namepla oducts with pa can be taken mware version described in t mware version e technical cha in mm ologies please ate art number AG from the prod V1 02 this document 47 anges without e specify the in GC100 duct nameplat t please chec t prior notice ...

Страница 7: ...l products must be operated in accordance with their respective operating manuals The scope of delivery consists of the following parts 1 Vacuum Gauge Controller 1 Power cord 1 Rubber bar 2 Rubber feet 4 Collar screws 4 Plastic sleeves 1 CD ROM manuals tools 1 EU Declaration of Conformity 1 Installation Manual Intended Use Scope of Delivery ...

Страница 8: ...or minor equipment damage The lamp display is lit The lamp display flashes The lamp display is off Press the key example parameter key Do not press any key Labeling Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end user of the product 1 1 Symbols Used Symb...

Страница 9: ...ag with live parts i d or any liquid e no objects e the equipmen evice must be it from the ma fety instruction assumes no li d parties mation in this a non conform nterventions th accessories 100 s and take the ider the safety ge s extremely h ds penetrate in enter through t t readily identifi ins supply yo ns to all other ability and the document ming manner modifications s not listed in e necess...

Страница 10: ...n female 19 connected in parallel Compatible gauges Pirani PVG 500 PVG 502 PVG 550 PVG 552 Pirani Capacitance PCG 750 PCG 752 Cold cathode IMG 500 Cold cathode Pirani FRG 700 FRG 702 Hot ionization Pirani FRG 720 FRG 730 Capacitance CDG 500 Voltage 24 V dc 5 Ripple 1 Current 0 1 A per channel Power 25 W per channel Fuse protection 1 5 A per channel with PTC element self resetting after turning the...

Страница 11: ...e to meas urement value for larger differences consider filter time constant Adjustment range depending on gauge 30 31 Hysteresis 1 F S for linear gauges 10 of measurement value for logarithmic gauges Contact type floating changeover contact Load max 60 V dc 30 W ohmic 30 V ac 1 A ohmic Service life Mechanical Electrical 1 108 cycles 1 10 5 cycles at max load Contact positions 20 Connector CONTROL...

Страница 12: ... 5 If no g 20 m 50 Ω re depen D Sub pin as FAT fil file han ACK N bi dire 1 stop 9600 ACK N bi dire no par 9600 DHCP readab or control pan 0 85 k 14 5 V dc auge is conne V ding on gauge appliance co ssignment le system ndling in ASC NAK ASCII wi ctional data flo bit no parity 19200 38400 NAK ASCII wi ctional 1 start rity bit no han 19200 38400 default or m ble via MAC nel or as a des g ected 14 5 ...

Страница 13: ... to the EN 602 ropriate meas ction class e mechanical s k chassis adap Guide r 100 nnel nstalled by per sary experienc duct into a 19 rack h is visibly dam he product is v re it is not inad into a 19 rac collar screws ass of the rac d in a rack it ction against f 204 1 regulati ures for the ra strain on the fr pter with a gui ail rsons who hav ce or who have k or a control maged into op visibly da...

Страница 14: ... 2 e Controller 14 ter 14 the rack chas The maxim not be exc Rack chass Height 2 Rac r AGC 100 He sis adapter in mum admissib eeded and the sis adapter ck installation eight 3 rack ch the rack fram le ambient tem e air circulatio He hassis adapter me mperature on must not be eight 3 r 15 10 must e obstructed ...

Страница 15: ...leeve ck adapter in t e maximum ad be exceeded apter panel as g the screws ack chassis ad eight 3 Ad H 100 adapter o the rack cha hassis adapter es is availabl the rack frame dmissible amb and the air cir upper extens supplied with dapter dapter panel eight 2 to heig assis adapter u r height 3 an e Accessorie e bient temperat rculation must sion to the fron the adapter p ght 3 using the scre adapt...

Страница 16: ...ction class of t nstalled in a ra protection ag EN 60204 1 r e measures fo ass nto a control p The m ture air cir l strain on the to the cut out our M3 or equi Height 3 assis adapter he rack chassi the rack ack it is likely gainst foreign egulations for r the rack to m panel the follo maximum adm 10 must rculation must front panel of of the control valent screws 3 r is adapter usin y to lower the ...

Страница 17: ...r co e your own su in a switching entral distribu must be ed with x 100 s a desk top u rubber bar are er feet to the r Sele max exce ber bar onto th roducts can be r power cable w only be plugge must not be n nd ord If the mai uitable cable w cabinet the m tor unit For this pu e supplied wit rear part of the ect a location w ximum ambien eeded e g du 10 he bottom edg e extremely ha with protective...

Страница 18: ... 1 only at o r AGC 100 crew enabling ductor e g wi two connection nector female nnector femal ge to the CH 1 sales litera compatibility ion e connection may be conne A or CH B Ot GER rdous voltage 61010 voltag protective low v nce the AGC 100 th the protecti ns available w e 8 pin CH A e 15 pin CH connector via ature or your sensor cable ected to each therwise the c ges exceeding voltage PELV Do n...

Страница 19: ...al Supply Supply com Signal inpu Identificatio Signal com Status HV_L HV_H HV ignment of the ce connectors Signal EMI status Signal inpu Status HV_H HV Supply com n c Degas Supply n c Identificatio Supply Signal com RxD TxD Chassis troller AGC e female 8 pin s 24 V mmon GND ut meas on mmon V_EMI e female 15 pi s s ut meas V_EMI mmon GND 24 V on 24 V mmon 100 RJ45 dc uring signal 0 n D Sub uring si...

Страница 20: ...threshold supply tur ssis GND analog outpu n 20 mV r AGC 100 ser to read the rror relay pheral compon ing your own GER rdous voltage 61010 voltag protective low v 15 pin D Sub 5 13 V d D 1 above or power rned off 24 V 0 V A Fuse pro self reset CONTRO a ground 2 above or power rned off t pin 1 differs measuring si nents to the CO screened ele ges exceeding voltage PELV dc tected at 300 tting after ...

Страница 21: ...g a screene rface connect s used for the eter saving rea he USB memo e allows direc he Ethernet ca Indicates that ect LED Indica rs data are be 100 or facilitates d ware update p ace connector d electromag or with maste connection of ad write data ory stick to the t communicat able to the con t a hardware c ates the status eing transmitte direct commun parameter sav to the con gnetic compati er fu...

Страница 22: ...uum Gauge 9 68 10 2 corre 34 10 1 corre Parameter Bar graph Bar graph with Pressure vs tim Set points 1 Relay on Display USB connector e Controller 22 esponds to esponds to set point me trend 2 n Rela Paramete r AGC 100 P ay off r or bar graph Parameter mod de activated Ke Operator ke Measurem Measurem floating po nential stat Pressure u eylock on eys ment channel ment value in int or expo tus uni...

Страница 23: ...or saving read active Error troller AGC on the rear of t n with the pow witched power ated in a rack AGC 100 orms a self tes ected gauges meters that we easurement m eters if require f with the pow is incorporated ast 10 s before nitialize itself in the followin de surement valu editing param tion paramete d displaying th eter group SEN d displaying g group SENSO d displaying g meter group GE d di...

Страница 24: ...Vacuum Gauge Controller AGC 100 24 Bargraph FSR ...

Страница 25: ...auges switches on Instead of the measurement value a status message may be displayed For certain gauges the emission can be switched on and off manually provided the sensor parameter is set to EMISSION HAND 39 Switching on the emission is only possible if the pressure is below 2 4 10 2 mbar Available for the following gauges Pirani PVG Pirani Capacitance PCG Cold cathode IMG Cold cathode Pirani FR...

Страница 26: ...ossible cause negative dr activated of 550 PVG552 e gauge e ni gauge ni gauge citance digital d but not identifia e Controller 26 erated with lin es rift ffset correction P Fo th di P P F FRG 720 F FRG 730 F l C C n able n r AGC 100 near gauges C n ress keys for or the measur he connected g isplayed for 6 PVG5xx PCG75x IMG500 FRG70x FRG720 FRG730 CGG500 Vx CDG500 100 noSENSOR noIDENT 27 CDG negati...

Страница 27: ...mode The respective parameter group is displayed in place of the bar graph Select group Switching function parameters 28 Gauge parameters 32 Gauge control 40 General parameters 42 Test parameters 47 Data logger 50 Parameter transfer 52 Confirm group Confirm the parameter The value flashes and can now be edited Edit the value Save the change and return to read mode 4 5 Parameter Mode Selecting a pa...

Страница 28: ...hing func Switching func One level back hing functions unctions is dis ntacts at the C he name of th arameter valu SP1 CH D Switching funct elect paramet dited function param iting and enter two switching of switching fu ction 1 lower th ction 1 upper t of switching fu ction 2 lower th ction 2 upper t k with two adju splayed on the CONTROL res e parameter a e are displaye DISABLED I tion 1 turned ...

Страница 29: ...ased by 1 increment Press key for 1 s The value is increased decreased continuously Save the change and return to read mode We recommend setting the upper threshold decade above the lower or the lower threshold decade below the upper threshold limit Editing and saving the parameter ...

Страница 30: ...ing e g SP1 L 5 00 4 I gauge dependent If another gauge type is connected the AGC 100 automatically adjusts the switching threshold if required SPx L min SPx L max PVG5xx I 2 10 3 SPx H max PCG75x I 2 10 3 IMG500 I 1 10 9 FRG70x I 1 10 9 FRG720 I 1 10 8 FRG730 I 1 10 8 CDG500 I F S 1000 all values in mbar GAS nitrogen 2 10 4 mbar if RNG EXT Pirani range extension is activated 43 The minimum hyster...

Страница 31: ... automatically adjusts the threshold if required SPx H min SPx H max PVG5xx I SPx L min 1 103 PCG75x I 1 5 10 3 IMG500 I 1 10 2 FRG70x I 1 10 3 FRG720 I 1 10 3 FRG730 I 1 10 3 CDG500 I F S all values in mbar GAS nitrogen The minimum hysteresis between the upper and lower switching threshold amounts to at least 10 of the lower threshold logarithmic gauges or 1 of the full scale value linear gauges ...

Страница 32: ... other gases COR I Offset correction HV CTRL I Activating deactivating high vacuum measurement circuit EMISSION I Emission FILAMENT I Filament selection DIGITS I Display resolution I One level back Some parameters are not available for all gauges and thus not always displayed 33 34 35 36 38 38 39 39 39 40 DEGAS I FSR I FILTER I OFFSET I GAS I COR I HV CTRL I EMISSION I FILAMENT I DIGITS I Availabl...

Страница 33: ...ve filament Available for the following gauges Pirani PVG Pirani Capacitance PCG Cold cathode IMG Cold cathode Pirani FRG 70x Hot ionization Pirani FRG 720 730 Capacitance CDG Value DEGAS I DEGAS OFF I Normal operation Degas blocked DEGAS ON I Degas The electron collection grid is heated to 700 C by electron bombardment and the electrode system is thus cleaned Duration 180 s Start Degas Duration o...

Страница 34: ...CDG Value FSR I e g FSR 1000 MBAR I 0 01 mbar 0 02 mbar 0 05 mbar 0 01 Torr 0 02 Torr 0 05 Torr 0 10 mbar 0 25 mbar 0 50 mbar 0 10 Torr 0 25 Torr 0 50 Torr 1 mbar 2 mbar 5 mbar 1 Torr 2 Torr 5 Torr 10 mbar 20 mbar 50 mbar 10 Torr 20 Torr 50 Torr 100 mbar 200 mbar 500 mbar 100 Torr 200 Torr 500 Torr 1000 mbar 1100 mbar 1000 Torr 2 bar 5 bar 10 bar 50 bar A conversion table can be found in the Appen...

Страница 35: ...ue As a result it will respond faster to interference in the measured values FILTER NORMAL I Normal factory setting Good relationship between response and sensitivity of the display and the switching function to changes in the measured values FILTER SLOW I Slow The AGC 100 does not respond to small changes in measured values As a result it will respond more slowly to changes in the measured values...

Страница 36: ...tching functions the analog outputs at the CONTROL connector 20 Wert OFFSET I OFFSET OFF I Offset correction factory deactivated e g OFFSET 9 53 I Offset correction activated display in the relevant units of measure ment Press key for 1 5 s The offset value is readjusted the actual measurement value is accepted as new offset value Reset the offset value Save change and return to read mode When off...

Страница 37: ...G When the zero of the gauge is readjusted the offset correction must be deactivated Value OFFSET I e g OFFSET OFF I Zero adjustment deactivated Lit solid after 1 5 s and as long as key remains pressed Press 1 5 s Zero adjustment of the digital CDG After adjusting the zero point a zero value is displayed Due to the measuring resolution of the CDG noise drift a zero with plus minus several digits a...

Страница 38: ... I Gas hydrogen GAS HE I Gas helium GAS NE I Gas neon GAS KR I Gas krypton GAS XE I Gas xenon GAS COR I Calibration factor for other gases by manually entering parameter COR The calibration factor COR allows the measured value to be calibrated for other gases characteristic curve in 1 8 This parameter is effective in the entire measurement range of the gauge Precondition Parameter GAS COR is set e...

Страница 39: ... PCG Cold cathode IMG Cold cathode Pirani FRG 70x Hot ionization Pirani FRG 730 only Capacitance CDG Value EMISSION I EMISSION AUTO I The emission is switched on and off automatically by the gauge EMISSION HAND I The emission is switched on and off by the user The symbol lid solid if the emission is switched on Means of selection Available for the following gauges Pirani PVG Pirani Capacitance PCG...

Страница 40: ...and activated RNG EXT 43 the display is reduced by one decimal digit SENSOR CONTROL I The sensor control group is used for displaying entering and editing parameters which define how the connected gauges are activated deactivated This group is available for the IMG gauges only S ON I Gauge activation S OFF I Gauge deactivation T OFF I OFF threshold I One level back IMG gauges can be activated by d...

Страница 41: ...d to specify the switch off threshold The sen sor is switched off when the pressure at the sensor exceeds the switch off threshold Definition of the OFF threshold for the gauge to be deactivated by itself This parameter is only available if the sensor deactivation parameter is set to S OFF SELF Value T OFF I e g T OFF 1 00 2 I The sensor is switched off when the pres sure exceeds the switch off th...

Страница 42: ...L I Display of measurement range end value I One level back Unit of measured values thresholds etc conversion table 82 Value UNIT I UNIT MBAR I mBar factory setting UNIT HPASCAL I hPa UNIT TORR I Torr only available if Torr lock is not activated 48 UNIT PASCAL I Pa UNIT MICRON I Micron 0 001 Torr only available if Torr lock is not activated 48 UNIT VOLT I V A change of the pressure unit influences...

Страница 43: ...i and Pirani Capacitance gauges with display measurement range up to 5 10 5 mbar Available for the following gauges Pirani PVG Pirani Capacitance PCG Cold cathode IMG Cold cathode Pirani FRG 70x Hot ionization Pirani FRG 720 730 Capacitance CDG Value RNG EXT I RNG EXT DISABLEDI Deactivated factory setting RNG EXT ENABLED I Display extended to 5 10 5 mbar Switching behaviour of the error relay Valu...

Страница 44: ...ed in tabular form and the last 100 measurement values 100 pixel are shown autoscaled The represented data string corresponds to a logging duration of 20 seconds BARGRAPH f 1s I p f t autoscaled 1 second pixel For each measurement every second a measurement value is saved in tabular form and the last 100 measurement values 100 pixel are shown autoscaled The represented data string corresponds to a...

Страница 45: ...d off com pletely after 1 minute Value CONTRAST I e g CONTRAST 40 I factory setting adjustable from 0 100 100 full contrast All user parameter settings are replaced by the default values factory settings Loading of the default parameter settings is irreversible Value DEFAULT I DEFAULT 2s I Press keys at the same time for 2 s to start loading default values DEFAULT SET I The default values are load...

Страница 46: ... format Value FORMAT I FORMAT X X I Floating point format if possible factory setting FORMAT X XESY I Exponential format Display of underrange or overrange Value END VAL I END VAL UR OR I When an underrange or overrange occurs UR or OR is displayed factory setting END VAL VALUE I When an underrange or overrange occurs the respective full scale value is displayed Measurement value format Display of...

Страница 47: ...OM I EEPROM test parameter memory DISPLAY I Display test I O I I O test I One level back The parameters in this group are available for all gauges The firmware version program version is displayed Version e g SOFTWARE 1 00 I This information is helpful when contacting Agilent Technologies The hardware version is displayed Hardware e g HARDWARE 1 0 I This information is helpful when contacting Agil...

Страница 48: ...nt units Torr and Micron not available The keylock function prevents inadvertent entries in the parameter mode and thus malfunctions Setting KEY LOCK I KEY LOCK OFF I Keylock function disabled factory setting KEY LOCK ON I Keylock function enabled Test of the program memory Test sequence FLASH I Press keys at the same time to start test FLASH RUN I Test in progress very briefly FLASH PASS I Test c...

Страница 49: ...g function Caution Caution The relays switch irrespective of the pressure Starting a test program may cause unwanted effects in connected control systems Disconnect all sensor and control system lines to ensure that no control commands or messages are triggered by mistake The relays switch on and off cyclically The switching operations are indicated optically and are also clearly audible The switc...

Страница 50: ...ies service center DATE I Current date TIME I Current time INTERVAL I Display interval DEC SEPARATOR I Decimal separator FILENAME I File name START STOP I Start stop record CLEAR I Deletion of files with displayed measurement data Value DATE I Current date in the format YYYY MM DD e g DATE 2015 04 15 I e g 2016 01 15 Value TIME I Current time in the format hh mm 24 h e g TIME 15 45 I e g 15 45 Dat...

Страница 51: ...ata display in the measurement mode only Value START I START I Press key to start record Data record is running display has changed to STOP and the down arrow is blink ing STOP I Press key to stop saving Data record is stopped display has changed to START and the up arrow is blinking The unit does not return automatically to the measurement mode as long as the arrows or in the display are blinking...

Страница 52: ... stick FAT32 CLEAR I Deletion of files with saved parameters I One level back Saving all parameters of the AGC 100 to a USB memory stick file ending CSV Value SAVE I SAVE SETUP I File name on the USB memory stick SETUP01 CSV SAVE SETUP99 I File name on the USB memory stick SETUP99 CSV SAVE RUNNING I CSV file is being saved SAVE DONE I Saving completed Loading all parameters from a USB memory stick...

Страница 53: ... formatting FORMAT RUNNING I Formatting in progress FORMAT DONE I Formatting completed Deleting all parameter files ending CSV from the USB memory stick Value CLEAR I Press keys at the same time to delete files CLEAR RUNNING I CSV files are being deleted CLEAR DONE I CSV files have been deleted Formatting Deleting ...

Страница 54: ...ansferred to the AGC 100 the automatic transmission of measured values stops After the necessary inquiries or parameter modifications have been made the transmission of measured values can be started again with the COM command 58 The data transmission is bi directional i e data and control commands can be transmitted in either direction 1 start bit 8 data bits no parity bit 1 stop bit no hardware ...

Страница 55: ...quest the ERROR word is transmitted HOST AGC 100 Explanation Mnemonics and parameters CR LF Receives message with end of message ACK CR LF Positive acknowledgment of a re ceived message ENQ Requests to transmit data Measurement values or parameters CR LF Transmits data with end of mes sage ENQ Requests to transmit data Measurement values or parameters CR LF Transmits data with end of mes sage The ...

Страница 56: ...asurement range linear gauges 64 FUM Filament user mode 63 GAS Gas type correction 65 HDW Hardware version 73 HVC HV control EMI on off 73 ITR Data output 65 LCM Start stop data logger 72 LNG Language display 70 LOC Keylock 73 MAC Ethernet MAC address 74 OFS Offset correction 66 PNR Firmware version 74 PR1 Measurement data 59 PRE Pirani range extension 71 RES Reset 59 RHR Operating hours 74 SAV Sa...

Страница 57: ...Vacuum Gauge Controller AGC 100 57 TKB Operator key test 76 TLC Torr lock 76 TMP Inner temperature of the unit 77 TRS Serial Interface test 77 UNI Pressure unit 71 WDT Watchdog control 77 ...

Страница 58: ...n error 7 Error FRG sx xxxxEsxx Measurement value 1 in current pressure unit s sign 1 Values always in exponential format For logarithmic gauges the 3 rd and 4 th decimal are always 0 Transmit ERR CR LF Error status Receive ACK CR LF Transmit ENQ Receive aaaa CR LF Description aaaa Error status aaaa 0000 No error 1000 ERROR controller error see display on front panel 0100 NO HWR no hardware 0010 P...

Страница 59: ...sign 1 Values always in exponential format For logarithmic gauges the 3 rd and 4 th decimal are always 0 Transmit RES a CR LF Description a a 1 Cancels currently active error and re turns to measurement mode Receive ACK CR LF Transmit ENQ Receive b b b CR LF Description b List of all present error messages b 0 No error 1 Watchdog has responded 2 Task fail error 3 FLASH error 4 RAM error 5 EEPROM e...

Страница 60: ...old Cathode Gauge FRG70x Cold Cathode Pirani Gauge CDG500 Capacitance Gauge FRG720 Hot Ionization Pirani Gauge FRG730 Hot Ionization Pirani Gauge noSEn No sensor noid No identifier Transmit SPS CR LF Receive ACK CR LF Transmit ENQ Receive a b CR LF Description a Status switching function 1 a 0 Off 1 On b Status switching function 2 TID Gauge identification 5 5 Switching Function Parameters SPS Swi...

Страница 61: ...uge s sign 1 Values can be entered in any format They are internally converted into the floating point format Receive ACK CR LF Transmit ENQ Receive a x xxxxEsxx y yyyyEsyy CR LF Description a Switching function assignment x xxxxEsxx Lower threshold in current pressure unit s sign y yyyyEsyy Upper threshold in current pressure unit s sign Transmit COR a aaa CR LF Description a aaa Calibration fact...

Страница 62: ... in the range p 1 0E 4 mbar the display resolution of the PCG75x gauges is reduced by one decimal digit Transmit DGS a CR LF Description a Degas a 0 Degas off default 1 Degas on 3 minutes Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Degas status Transmit EUM a CR LF Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Emission a 0 Manually 1 Automatic default DCD Display re...

Страница 63: ...st 2 Normal 3 Slow Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Filter time constant Transmit FUM a CR LF Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Filament a 0 Automatic default 1 Filament 1 2 Filament 2 FIL Measurement value filter FUM Filament user mode FRG730 ...

Страница 64: ... Torr 2 0 02 mbar 3 0 02 Torr 4 0 05 mbar 5 0 05 Torr 6 0 10 mbar 7 0 10 Torr 8 0 25 mbar 9 0 25 Torr 10 0 50 mbar 11 0 50 Torr 12 1 mbar 13 1 Torr 14 2 mbar 15 2 Torr 16 5 mbar 17 5 Torr 18 10 mbar 19 10 Torr 20 20 mbar 21 20 Torr 22 50 mbar 23 50 Torr 24 100 Torr 25 100 mbar 26 200 mbar 27 200 Torr 28 500 mbar 29 500 Torr 30 1000 mbar 31 1100 mbar 32 1000 Torr 33 2 bar 34 5 bar 35 10 bar 36 50 b...

Страница 65: ...ium 4 Neon 5 Krypton 6 Xenon 7 Other gases Transmit HVC a CR LF Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Mode a 0 Off 1 On Transmit ITR CR LF Receive ACK CR LF Transmit ENQ Receive aa aa aa aa aa aa aa aa CR LF Description aa aa aa aa aa aa aa aa Data string byte 0 7 in hex format GAS Gas type correction HVC HV control EMI on off ITR Data output FRG 720 FRG 730 CDG ...

Страница 66: ...ted into the floating point format Receive ACK CR LF Transmit ENQ Receive a sx xxxxEsxx CR LF Description a Mode sx xxxxEsxx Offset 1 in current pressure unit s sign Transmit SC1 a b c ccEscc d ddEsdd CR LF Description a Gauge activation a 0 Manual default 1 Hot start 3 Via measurement channel 1 b Gauge deactivation b 0 Manual default 1 Self control 3 Via measurement channel 1 c ccEscc ON threshol...

Страница 67: ...acklight Transmit BAU a CR LF Description a Transmission rate a 0 9600 Baud 1 19200 Baud 2 38400 Baud 3 57600 Baud 4 115200 Baud default As soon as the new baud rate has been entered the report signal is transmitted at the new transmission rate Receive ACK CR LF Transmit ENQ Receive x CR LF Description a Transmission rate 5 8 General Parameters BAL Backlight BAU Transmission rate USB ...

Страница 68: ...corresponds to a logging duration of 20 seconds 8 p f t autoscaled 1 second pixel For each measurement every second a measurement value is saved in tabular form and the last 100 measurement values 100 pixel are shown autoscaled The represented data string corresponds to a logging duration of 100 seconds 9 p f t autoscaled 6 seconds pixel For each measurement every 6 seconds a measurement value is ...

Страница 69: ...our 4 After 2 hours 5 After 8 hours 6 The backlight is switched off completely after 1 minute Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Screensaver Transmit ERA a CR LF Description a Switching behaviour error relay a 0 Switches for all errors default 1 Only unit errors 2 Error sensor and unit error Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Switching behaviour ...

Страница 70: ... CR LF Description a Measurement range end value Transmit FMT a CR LF Description a Number format measurement value a 0 Floating point format if possible default 1 Exponential format Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Number format Transmit LNG a CR LF Description a Language a 0 English default 1 German 2 French Receive ACK CR LF Transmit ENQ Receive a CR LF Description a...

Страница 71: ...easurement range up to 5 10 5 mbar Transmit SAV a CR LF Description a Save parameters to EEPROM a 0 Save default parameters default 1 Save user parameters Receive ACK CR LF Transmit UNI a CR LF Description a Pressure unit a 0 mbar bar 1 Torr 2 Pascal 3 Micron 4 hPascal default 5 Volt Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Pressure unit PRE Pirani range extension SAV Save para...

Страница 72: ... logging stopped 1 Start data logging started 2 Clear deletion of measurement data file ending CSV from USB memory stick b Data logging interval b 0 Logging interval 1 s 1 Logging interval 1 10 s 2 Logging interval 1 30 s 3 Logging interval 1 60 s 4 Logging interval in the event of measurement value changes 1 5 Logging interval in the event of measurement value changes 5 c Decimal separator c 0 de...

Страница 73: ...rameters from the USB memory stick onto the AGC 100 3 Formatting USB memory stick FAT32 4 Deleting parameter files ending CSV from the USB memory stick bb Number in the file name 0 99 For service personnel Transmit HDW CR LF Receive ACK CR LF Transmit ENQ Receive a a CR LF Description a a Hardware version e g 1 0 Transmit LOC a CR LF Description a Keylock a 0 Off default 1 On Receive ACK CR LF Tra...

Страница 74: ...rsion e g 1 00 Transmit RHR CR LF Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Run operating hours e g 24 hours Transmit TAD CR LF Receive ACK CR LF Transmit ENQ Receive aa aaaa CR LF Description aa aaaa A D converter Measurement signal 0 0000 11 0000 V Transmit TAI CR LF Receive ACK CR LF Transmit ENQ starts the test very brief Receive a aa CR LF Description a aa Identification kO...

Страница 75: ...repeating the test EEPROM life Receive aaaa CR LF Description aaaa Error word Test of the program memory Transmit TEP CR LF Receive ACK CR LF Transmit ENQ Starts the test very brief Receive aaaa bbbbbbbb CR LF Description aaaa Error word bbbbbbbbbb Check sum hex Caution Caution The relays switch irrespective of the pressure Starting a test program may cause unwanted effects in connected control sy...

Страница 76: ...d Receive ACK CR LF Transmit ENQ Receive a b CR LF Description a I O test status b Relay status Transmit TKB CR LF Receive ACK CR LF Transmit ENQ Receive abcd CR LF Description a Key 1 a 0 Not pushed 1 Pushed b Key 2 b 0 Not pushed 1 Pushed c Key 3 c 0 Not pushed 1 Pushed d Key 4 d 0 Not pushed 1 Pushed Transmit TLC a CR LF Description a Torr lock a 0 Off default 1 On Receive ACK CR LF Transmit EN...

Страница 77: ...ement 1 default 1 If the watchdog has responded the error is automatically acknowl edged and cancelled after 2 s Receive ACK CR LF Transmit ENQ Receive a CR LF Description a Watchdog control Transmit AYT CR LF Receive ACK CR LF Transmit ENQ Receive a b c d e CR LF Description a Type of the unit e g AGC 100 b Model No of the unit e g AGC100 c Serial No of the unit e g LI1605F001 d Firmware version ...

Страница 78: ...est for parameters of switching function 1 setpoint 1 Positive acknowledgement Request for data transmission Thresholds T SP1 1 6 80E 3 9 80E 3 CR LF R ACK CR LF Modification of parameters of switching function 1 setpoint 1 Positive acknowledgement T FOL 2 CR LF R NAK CR LF T ENQ R 0001 CR LF T FIL 2 CR LF R ACK CR LF T ENQ R 2 CR LF Modification of filter time constant syntax error Negative ackno...

Страница 79: ...roller AGC ide of the unit ouring cleanin DANGER R mains voltag with live parts i nit e no liquids pe a battery typ egrity of the re repeatedly sho service cente 100 a slightly moi g agents ge s extremely h enetrate into th pe CR2032 se al time clock ows an incorre er ist cloth will us hazardous whe he equipment ervice life 10 Battery replac ect date Plea sually do Do n en liquids pene t years in ...

Страница 80: ...o the AGC 100 ack nowledges the message automatically after 2 s 48 The watchdog has tripped because of a severe electric disturbance or an operating system error Acknowledge with the key If the watchdog is set to WATCHDOG AUTO the AGC 100 acknowledges the message auto matically after 2 s 48 DATA CORRUPTED I Parameter memory error EEPROM Acknowledge with the key If the problem persists after the me...

Страница 81: ...ctricity humidity etc may damage electronic components Store the product in an antistatic bag or container Observe the rele vant specifications under Technical Data 10 11 Disposal WARNING WARNING substances detrimental to the environment Products or parts thereof mechanical and electric components operating fluids etc may be detrimental to the environment Please dispose of such materials in accord...

Страница 82: ...0 1 mBar Bar Pa hPa kPa Torr mm HG mBar 1 1 10 3 100 1 0 1 0 75 Bar 1 10 3 1 1 10 5 1 10 3 100 750 Pa 0 01 1 10 8 1 0 01 1 10 3 7 5 10 3 hPa 1 1 10 3 100 1 0 1 0 75 kPa 10 0 01 1 10 3 10 1 7 5 Torr mm HG 1 332 1 332 10 3 133 32 1 3332 0 1332 1 1 Pa 1 N m2 mm m inch ft mm 1 10 3 39 37 10 3 3 281 10 3 m 10 3 1 39 37 3 281 inch 25 4 25 4 10 3 1 8 333 10 2 ft 304 8 0 305 12 1 Kelvin Celsius Fahrenheit...

Страница 83: ... off the unit Plug in the memory stick and then turn on the unit The update occurs automatically in the following steps BOOTING I Very brief BOOTLOADER V1 x I Very brief ERASING FW I Old firmware is being deleted from the unit UPDATING FW I New firmware is being loaded onto the unit UPDATE COMPLETE I Update completed Remove the memory stick and the unit will restart automatically If necessary cust...

Страница 84: ...n e Controller 84 USB cable ty SB UpdateToo nnect n Release No r AGC 100 ype A B conne ol select the C otes to view t ect the unit to t COM interface the software re S the computer e from the men release notes Successfully co nu and click onnected ...

Страница 85: ...rom disk www agilent co oad from serve desired firmw Update The was not succe 100 e select firmw Download a om Then sele er The upda ware version fro firmware is up ssful try again ware a copy of the f ect the approp ate tool connec om the selecti pdated n Progress in irmware from priate folder cts to the inter ion list dicator our rnet ...

Страница 86: ...ORE SETUP 52 Connect the AGC 100 with an Ethernet patch cable to the network Search for the AGC 100 in the network using the Ethernet Configuration Tool and assign it to a virtual COM interface 87 Start the program for communication with the AGC 100 and connect it to the assigned COM interface If unknown ask the network administrator for the Ethernet parameters IP ADDRESS GATEWAY NETMASK and DHCP ...

Страница 87: ... DHCP OFF Load the modified parameters onto the AGC 100 RESTORE SETUP 52 Connect the AGC 100 to a computer with a crossover Ethernet cable via a switch or with an Ethernet patch cable precondition the interface is auto MDI X capable Search for the AGC 100 in the network using the Ethernet Configuration Tool and assign it to a virtual COM interface 87 Start the program for communication with the AG...

Страница 88: ...atic or manual r AGC 100 nfiguration To cal network for ection window selected dev network settin ool and click on r connected de The Device ice ng occurs in th Automatic ne DHCP serve Manual netwo n Search De evices and lis e Info registe he Network S etwork setting er required work setting evices the ts the devices r shows basic Settings s c ...

Страница 89: ...h device a a new COM The and troller AGC Serial Port r and or M Port can be e new created d in the Windo 100 register a spec created virtual interfac ws Device Ma cific COM Por ace COM app anager rt can be assig pears in the lis gned to st box ...

Страница 90: ...rating Instructions Pirani Standard Gauge PVG 500 PVG 502 tqna69e1 Agilent Technologies Lexington MA 02421 USA 5 www agilent com Operating Instructions Pirani Capacitance Diaphragm Gauge PCG 750 PCG 752 tqna77e1 Agilent Technologies Lexington MA 02421 USA 6 www agilent com Operating Instructions Pirani Standard Gauge PVG 550 PVG 552 tqna79e1 Agilent Technologies Lexington MA 02421 USA 7 www agilen...

Страница 91: ...Controller AGC 100 91 ETL Certification ETL LISTED The product AGC 100 conforms to the UL Standards UL 61010 1 and UL 61010 2 030 is certified to the CSA Standards CSA C22 2 61010 1 and CSA C22 2 61010 2 030 4010094 ...

Страница 92: ...Vacuum Gauge Controller AGC 100 92 Notes ...

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Agilent Technologies AGC-100, Руководство пользователя, Страница: 90 / 96

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