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10
○
Disclaimer
a) Failure occurred after expiration of warranty period.
b) Failure caused by force majeure, such as fire, storm and flood damage, earthquake,
lightning strike, war etc.
c) Failure occurred due to carelessness handling or faulty usage.
d) Products remodeled, disassembled or repaired without ULVAC’s acceptance.
e) Failure occurred under abnormal environment, such as intense electromagnetic field,
radiation, high-temperature, high-humidity, flammable gases, corrosive gases, dust etc.
f) Failure occurred by noise.
g) Secondary damage by defect of this Product defect.
h) Secondary damage to Buyer by the reason that third party sued ULVAC for patent
infringement.
i) ULVAC engineer decided the reason of failure was improper use which does not conform to
the use condition of this Product.
j) Consumable parts.
k) The "SECURITY seal" certificates that the product was made or maintenanced by ULVAC
or by ULVAC authorized facility. In case "this label is removed" or "there is a mark showing
once this label has been removed", ULVAC warranty shall not be applied to the product.
○
Others
a) In case, special agreement or memorandum for specifications is made individually.
b) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime,
Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade
Law.
c) As for the question and consultation, Buyer shall check the model and serial number and
ask the local representative or ULVAC, Inc.
https://www.ulvac.co.jp/en/support/
d) The contents of this document are subject to change without notice in future.
Summary of Contents for UTM2300 Series
Page 2: ...This page is intentionally left blank...
Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Page 30: ...16 3 3 3 Controller This page is intentionally left blank...
Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Page 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
Page 98: ...84 10 This page is intentionally left blank...
Page 100: ...Index Index 2 This page is intentionally left blank...