3.2
Principle of Turbo Molecular Pumping
13
3
Fig.3-1
Pump Sectional Drawing
(1) High frequency motor
(6) Radial magnetic bearing
(11) Outlet flange
(2) Drive shaft
(7) Axial magnetic bearing
(12) Protective net
(3) Rotor blade
(8) Touch-down bearing
(13) Cooling water pipeline
(4) Stator blade
(9) Gap sensor
(14) Controller
(5) Spacer
(10) Inlet flange
Summary of Contents for UTM2300 Series
Page 2: ...This page is intentionally left blank...
Page 10: ...viii Location of Label...
Page 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Page 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Page 30: ...16 3 3 3 Controller This page is intentionally left blank...
Page 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Page 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Page 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Page 73: ...7 7GAS PURGE...
Page 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Page 95: ...10 10WARRANTY CLAUSES...
Page 98: ...84 10 This page is intentionally left blank...
Page 100: ...Index Index 2 This page is intentionally left blank...