Ulvac UTM2300 Series, Instruction Manual

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SECTION 5 INSTALLATION
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5
NOTICE
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G/
50 Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.
CAUTION
The center of gravity of the pump is indicated in Fig. 5-3. Be sure that the pump does not move
or fall down during installation or storage.
CAUTION
This pump is a heavy equipment.
Lift this pump by two or more people or by using the lifter or the crane, during installation.
Need two or more eyebolts as described in Fig. 5-2 when lifting this pump on vertical position.
Need four eyebolts as described in Fig. 5-2 when lifting this pump on inverted position. There is
a possibility that the pump falls when using less eyebolts, than specified in Table 5-1.
A crane and eyebolts due to lifting operations should withstand the load of five times or more
the weight of the TMP pump, and rope should be seven times or more. Use an eyebolt which
confirms to ISO 3266.
There is a possibility that the pump falls when installing it on other positions.