Ulvac UTM2300 Series, Instruction Manual

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6
6
OPERATION
6.1 Overview
6.1.1 Introduction : Operation Modes
6.2 Startup Preparation
6.2.1 Start-up Preparation Sequence in LOCAL Mode
6.2.2 Start-up Preparation Sequence in REMOTE-control Connector
6.2.3 Start-up Preparation Sequence in Other Communication Means
6.3 Start-up
6.3.1 Start-up Sequence in LOCAL Mode
6.3.2 Start-up Sequence in REMOTE-control Connector
6.3.3 Start-up Sequence in Other Communication Means
6.4 Shutting Down
6.4.1 Preparations Prior to Shutting Down Operation
6.4.2 Shutting Down Sequence in LOCAL Mode
6.4.3 Shutting Down Sequence in REMOTE-control Connector
6.4.4 Shutting Down Sequence in Other Communication Means
6.5 Variable Speed Operation
6.4.1 Preparations Prior to Shutting Down Operation
6.4.2 Shutting Down Sequence in LOCAL Mode
6.4.3 Shutting Down Sequence in REMOTE-control Connector
6.4.4 Shutting Down Sequence in Other Communication Means
6.6 Software Operation
6.7 Remote-control Connector
6.7.1 Specification
6.7.2 Pin Assignment
6.7.3 Connector
6.8 Communication Specifications
6.8.1 RS-232C
6.8.2 RS-485
6.8.3 Connector