Ulvac UTM2300 Series, Instruction Manual

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vi
NOTICE
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause deterioration of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G/
50 Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.