Ulvac UTM2300 Series, Instruction Manual, Page: 85 / 102

9.3 Nothing Happens After an Operation is Made
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9
9.3
Nothing Happens After an Operation is Made
Table 9-1 Nothing Happens After an Operation is Made
Problem Possible causes Corrective action Section
1
Power ON/OFF switch in
the ON position but the
turbo molecular pump fails
to operate. Electrical power cable
not properly connected. Properly connect the electrical power
cable. 5.2
Electrical power outside
power supply unit’s
power range. Operate within power supply unit’s
power range. 4.1
2
START/STOP button is
pushed but the turbo
molecular pump does not
accelerate. In REMOTE mode
(POWER lamp lights) By maintained push, change to
LOCAL mode (POWER lamp blinks) 6.2
Other causes. Check the STATUS lamp is not lights
in orange. If an alarm is indicated,
correct the malfunction and reset
alarm. 9.5
3
Remote "STOP" signal
active but the turbo
molecular pump does not
accelerate. In LOCAL mode
(POWER lamp blinks) By maintained push, change to
REMOTE mode (POWER lamp lights) 6.2
"STOP" signal active. Deactivate "STOP" signal. 6.7
Other problems. Check the STATUS orange lamp is not
ON. If an alarm is indicated, correct
the malfunction and reset. 9.5
4
START/STOP button is
pushed but the turbo
molecular pump does not
decelerate. In REMOTE mode
(POWER lamp lights) By maintained push, change to
LOCAL mode (POWER lamp blinks) 6.2
5
Remote "STOP" signal
activated but the turbo
molecular pump does not
decelerate. In LOCAL mode
(POWER lamp blinks) By maintained push, change to
REMOTE mode (POWER lamp lights) 6.2