Ulvac UTM2300 Series, Instruction Manual, Page: 35 / 102

4.2 The Maximum Allowable Flow Rate
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4.2
The Maximum Allowable Flow Rate
(Note 1) Consult your ULVAC representative before using gasses except shown in above table.
(Note 2) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
(Note 3) The maximum allowable flow rate depends on the gas type, the Assuming the parts
connected to the molecular pump inlet and the gas purge flow rate.
4.3
Standards Fulfilled
Description
Gas type
(Note 1)
APC valve
temperature
Gas purge
flow rate
The maximum allowable flow rate
(Note 2) (Note 3)
UTM2300A-MI-AVWX
UTM2300A-MI-AFWX
Ar 35 degrees C.
0 mL/min 600 mL/min
30 mL/min 850 mL/min
UTM2300A-MI-BVWX
UTM2300A-MI-BFWX
Ar 35 degrees C.
0 mL/min 900 mL/min
30 mL/min 1250 mL/min
Safety EN 61010-1
UL 61010-1
EN 1012-2
EMC EN 61326-1 Class A
EN 61000-6-2