Ulvac UTM2300 Series, Instruction Manual

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SECTION 2 IDENTIFICATION AND FUNCTION
10
2
2.3
External I/F Panel
Fig.2-3 I/F Panel
(1) REMOTE connector ........................ Connector for remote-control.
(Refer to Section 6.7 "Remote-control Connector".)
(2) SERIAL connector ........................... Connector for RS-232C or RS-485 communication.
(Refer to Section 6.8 "Communication Specifications".)
(3) VALVE connector ............................ Water valve connector.
(Refer to Section 5.3 "Preparation for Operation".)
(Note 1) All interfaces are SELV (safety extra-low voltage).