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Program 14 "Air leakage Test”
This program is intended to test air leakage to chamber through the door seal
or any other seals.
This test is performed in vacuum phase.
Performance description:
Vacuum is built up in the chamber down to 10kPa. At this stage all valves and
motors are shut.
A period of 5 minutes is counted to enable stabilization of pressure.
During the next 10 minutes the pressure is monitored.
The allowable change of pressure during these 10 minutes is 1.3kPa.
Summary of Contents for 2301006
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Page 14: ...Page 9 of 117 pages...
Page 45: ...Page 40 of 117 pages 4 CONTROL AND MONITORING Control Panel CAT 2007...
Page 79: ...Page 74 of 117 pages Control Panel Assembly...
Page 84: ...Page 79 of 117 pages SERVICE INSTRUCTIONS...
Page 105: ...VERTICAL SLIDING DOOR Page 100 of 117 pages...
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Page 109: ...Page 104 of 117 pages XPCS Manual...