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Contents
3.1 Unpacking and Inspection ...................................................................................................3-1
3.2 Control Elements, Displays, and Connections .....................................................................3-4
3.2.1 Sensor Head .............................................................................................................3-4
3.2.2 Front-End .................................................................................................................3-5
3.2.3 Controller ..................................................................................................................3-7
3.2.4 Data Management System .......................................................................................3-8
3.3.1 Sensor Head ...........................................................................................................3-12
3.3.2 Objective Adapter/Objective Turret ..........................................................................3-13
3.3.3 Objective Positioner (with MSA-A-TMS Option) .......................................................3-14
3.3.4 Holder for Objective Positioner (with MSA-A-TMS Option) ......................................3-16
3.4.1 Connecting the Protective Earth Cable ...................................................................3-21
3.4.2 Connecting the Hardware .......................................................................................3-25
3.4.3 Connecting the Signals ...........................................................................................3-31
3.4.4 Connecting the Mains Cables .................................................................................3-33
3.5.1 Out-of-Plane Vibrations ...........................................................................................3-33
3.5.2 In-Plane Vibrations .................................................................................................3-38
3.5.3 Topography Measurement .......................................................................................3-44
4.1 Software .............................................................................................................................4-1
4.2 Selecting and Exchanging Objectives .................................................................................4-1
4.3 Overview of the Parfocal Lengths of the Objectives ............................................................4-2
5.1 General Tests .....................................................................................................................5-1
5.2 Problems Connecting to the Signal Generator ....................................................................5-3
5.3 Problems Connecting to the Front-End ...............................................................................5-3
5.4 No Laser Beam ...................................................................................................................5-4
5.5 Illumination Module in the Sensor Head does not Light up ..................................................5-4
5.6 Laser Beam is Not Pointing at the Scan Points ...................................................................5-4
5.7 Measurement Signal is Faulty .............................................................................................5-5
5.8 Measurement Takes an Unusually Long Time .....................................................................5-5
6.2.1 General Data ............................................................................................................6-1
6.2.2 Optics .......................................................................................................................6-5
6.3.1 General Data ............................................................................................................6-6
6.3.2 Signal Inputs and Outputs .........................................................................................6-7
Summary of Contents for MSA-600
Page 6: ...iv Contents...
Page 20: ...1 14 1 Safety Information...
Page 24: ...2 4 2 Introduction...
Page 42: ...3 18 3 First Steps Figure 3 15 Holder with objective adapter...
Page 67: ...3 43 3 First Steps Figure 3 31 Display of sine fit in the analyzer green graph...
Page 74: ...4 4 4 Operating...
Page 80: ...5 6 5 Troubleshooting...
Page 94: ...A 2 A Declarations of Conformity Figure A 2 UKCA declaration of conformity...
Page 98: ...iv Index...