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6-5
6 Technical Specifications
6.2.2
Optics
Laser
Illumination Module (L
ED
)
Camera
Bright Field Objectives (for Out-of-Plane Measurements)
Wavelength:
532 nm ±1 nm
Laser class:
3R
Max. power output:
< 5 mW
Wavelength:
470 nm
Max. power output:
< 20 mW
Risk category:
2 (according to EN 62471)
Type:
CMOS digital camera
Interface:
Ethernet
Pixel size (H x V):
5.86 µm x 5.86 µm
Used resolution:
1 720 Pixel x 1 200 pixels
Article name
Objective
manufacturer
Magnification
Nominal
objective
working
distance
Field of
view
Nominal
spot
diameter
Depth of
field
object
beam
1
x
[mm]
[mm x mm] (1/e
2
) [µm]
[µm]
A-MOB-001X
Mitutoyo
1
13
2
10 x 7.0
46
5 000
A-MOB-002X
Mitutoyo
2
34
5.1 x 3.5
23
1 200
A-MOB-005X
Mitutoyo
5
34
2.0 x 1.4
9.3
180
A-MOB-0010X
Mitutoyo
10
34
1.0 x 0.70
4.6
45
A-MOB-0020X
Mitutoyo
20
20
0.51 x 0.35
2.3
12
A-MOB-0050X
Mitutoyo
50
13
0.20 x 0.14
1.4
2.5
A-MOB-00100X
Mitutoyo
100
6
0.10 x 0.070
0.8
1
A-MOB-10X-LD-B
Polytec
10
48.9
3
1.0 x 0.70
4.6
45
1
Specifies the size of the range (typical) within which the signal power drops less than 3 dB below the maximum value
2
The specified value is only valid without
λ
/4 retardation plate. By default, the
λ
/4 retardation plate is attached to the 1x
microscope objective and needs to be removed before making the measurement.
3
The parfocal length of this objective is 135 mm. To measure through 6 mm thick quartz glass plates of vacuum chambers, you
can remove the first glass element in the clamping ring. Thus the working distance (WD) will be increased up to 56 mm.
Summary of Contents for MSA-600
Page 6: ...iv Contents...
Page 20: ...1 14 1 Safety Information...
Page 24: ...2 4 2 Introduction...
Page 42: ...3 18 3 First Steps Figure 3 15 Holder with objective adapter...
Page 67: ...3 43 3 First Steps Figure 3 31 Display of sine fit in the analyzer green graph...
Page 74: ...4 4 4 Operating...
Page 80: ...5 6 5 Troubleshooting...
Page 94: ...A 2 A Declarations of Conformity Figure A 2 UKCA declaration of conformity...
Page 98: ...iv Index...