Polytec MSA-600, Operating Instructions Manual

Page: 22 / 99

2-2
2 Introduction
Sensor head The laser interferometer components, such as laser source, detector, beam
splitter, and Piezo tilting mirror are located in the sensor head housing. These
components direct the measurement beam and reference beam where
applicable (with MSA-A-DIF option). The optical assembly is supplemented by
a camera and a stroboscope-capable illumination module for the live video
image and for recording series of images for topography measurements (with
MSA-A-TMS option). An objective turret at the beam exit allows quick
exchange of objectives with different levels of magnification. Additionally (with
MSA-A-TMS option), you can use an objective positioner to adjust the
objective position of the interference objective and therefore the
measurement plane with nanometer accuracy.
Front-end The front-end provides the voltages, drivers and clock signals for operating
the sensor head and is the central interface for connecting external devices
and signals.
Controller The controller used in the measurement system controls the positions of the
Piezo tilting mirror in the sensor head. For topography measurements (with
MSA-A-TMS option), it also controls the objective positioner.
Data
Management
System
In the data management system, the interferometer signal from the sensor
head is digitized and demodulated. The software installed there controls the
entire measurement system and evaluates the measurement data. In
addition, the generator for the excitation and control signals is integrated in
the industrial PC for the MSA-600-X product variant.
Signal
generator
With the product variant MSA-600-U, an external signal generator with high
bandwidth and output power optionally generates the excitation signals. The
respective software application supports you in configuring the signal
generator.
2.3 MSA-600 Options
Options as listed in the following table are available for the MSA-600.
Option name Description
MSA-600-U This option offers a bandwidth extension of up to 2.5 GHz.
MSA-A-DIF This option allows a differential measurement.
MSA-A-TMS This option allows a topography measurement.
MSA-A-PMA (Only MSA-600-X) This option allows an In-Plane measurement.