horiba GA-370, Instruction Manual

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8 Reference
71
8.2 Specifications
Name Trace gas monitor
Model GA-370
Measurement targets
CO, CO
2
, and CH
4
in bulk gases (Air, N
2
, He, Ar, O
2
, and H
2
) for semiconductor
manufacturing processes
No. of measurement
components
1 component or 2 components (measurement base gas specification)
Measuring principle Cross-flow modulation non-dispersive infrared (NDIR) absorption method
Measurement ranges 0 ppm to 1/2/5/10 ppm
Minimum detection
sensitivity
0.01 ppm
Repeatability Within ±2% of full scale
Indication error Within ±2% of full scale
External dimensions 430 (W) × 221 (H) × 555 (D) mm (excluding protrusions)
Mass Approx. 18 kg
Power supply 100 V to 240 V AC, within ±10% (max. voltage: 250 V AC)
Frequency 50/60 Hz (±1.0%)
Power consumption Approx. 100 VA
Sample gas flow rate 3.5 L/min ±0.1
Sample gas pressure 40 kPa to 100 kPa
Pressure control method Depressurized sampling method using pressure regulator
Display
Screen switching using touch panel
Analog output
Max. 2 channels isolated output
0 mA to 16 mA, 4 mA to 20 mA, 0 to 20 mA, or 0 V to 1 V and 0 V to 10 V
Current output: Allowable load resistance 750

or less
Voltage output: Input impedance 100 k

or higher
Contact output
Max. 8 channels isolated output
Max. voltage 30 V DC, max. current 1 A
Min. voltage 0.1 V DC, min. current 0.1 mA
Contact input
Max. 8 channels isolated input
Open circuit voltage 24 V
Short circuit current 10 mA
Max. load resistance 50

or less
Min. pulse width: 0.5 seconds
Zero drift Within ±0.02 ppm/day, within ±0.03 ppm/week
Span drift Within ±2.0% of full scale/day, within ±3% of full scale/week
Response speed (T
90
)
180 s or less
Total interference 0.1 ppm or less in 10 ppm range (in 0°C saturated moisture concentration)
Installation conditions
Ambient
temperature
0°C to 40°C
Ambient
relative
humidity
85% or less
Dust Less than environment standard
Vibration
0.29 m/s
2
or less at 100 Hz or less
Altitude 3000 m or below