horiba GA-370, Instruction Manual

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1 Overview
1
1 Overview
This chapter describes various parts with which you should familiarize yourself before
operations.
1.1 Introduction
GA-370 Trace Gas Monitor is the analyzer that uses the measurement principle of the cross-
flow modulation non-dispersive infrared absorption method. Specifically, this analyzer can be
used to analyze the impurity gases (CO, CO
2
, and CH
4
) in bulk gases used in semiconductor
manufacturing processes.
Air, N
2
, He, Ar, O
2
, and H
2
are used as bulk gases, and all of them are supported by this
analyzer.
Features

Adopts cross-flow modulation to obtain stable continuous measurement values over a
long period of time with no zero drift.

Up to two components from among CO, CO
2
, and CH
4
can be loaded per one analyzer
for digital concentration display of two components simultaneously.

A 19-inch rack case facilitates designing a system in which the frames of a 19-inch rack
are easily arranged.

Equipped with function for notifying of events (e.g. sample pressure alarm and other
alarms).

External range change is available.