Leak
Menu
Run
Stop
Power
Mode
MANUAL
Standby
00:00:00
Display
1013
hPa
Set Press
hPa
200
Leak
Menu
Run
Stop
Power
PLEASE CLEANING.
-11-
Warnings will be released automatically when the release conditions are met.
They will also be released automatically when operation has ended.
Operation status displays will switch between "Run" and "Warning" alternately.
Warning
Recommended cleaning display
When the accumulated operation time exceeds 10 hours while the
automatic cleaning time is set at “Off”, a ”PLEASE CLEANING”
message to prompt cleaning will appear after operation is stopped.
Cleaning can be started by keeping the [Leak] key pressed for three
seconds or more. The cleaning process makes solvent remaining in the
control solenoid valve or pipes evaporate and discharge.
Although you can operate the unit by pressing the Run/Stop key, the
same message ”PLEASE CLEANING” will appear again when
operation is completed.
*See the conditions below as a rough guide for auto cleaning time:
When a low boiling point solvent is mainly used: 3 min
When a high boiling point solvent is mainly used: 5 min
See P.39 for auto cleaning settings.
*See P.40 for manual cleaning settings.
No.
Names
Contents and status
How to release
13
Insufficient
decompression
capacity
Indicated when pressure cannot be reduced
by 1hPa or more for one minute during
forced decompression during operation of a
control mode.
Released automatically when
pressure reduced by 1hPa or
more for one minute or the
setting is attained.
14
Pressure drop
This indication appears when the measured
pressure drops below the set pressure by
10hPa or more during fixed-value control.
Released automatically when
returned to the set pressure.
15
Pressure increase
This indication appears when the measured
pressure exceeds the hysteresis of the set
pressure for 10 seconds continuously during
fixed-value control.
When the inverter pump is used, it appears
when the measured pressure exceeds 2% of
the set pressure.
Released automatically when
returned to the set pressure.
16
Slop pressure drop
This indication appears when the measured
pressure exceeds the hysteresis of the set
pressure for 10 seconds continuously during
fixed-value control.
Released automatically when
the pressure returns to the target
pressure.
17
Slop pressure
increase
This indication appears when the measured
pressure exceeds the hysteresis of the target
slop pressure for 10 seconds continuously
during slope control.
When the inverter pump is used, it appears
when the measured pressure exceeds 2% of
the set pressure.
Released automatically when
the pressure returns to the target
pressure.
18
Insufficient slope
decompression
capacity
This indication appears if the fixed-value set
pressure is not attained even when 30
seconds have passed since the end of slope
control.
Released automatically when
returned to the set pressure.