INTELLIGEN MV DISPENSE SYSTEM
8
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Communications/
power cable
Vacuum
inlet
Pressure
inlet
Fluid
inlet
Vent
Fluid
outlet
228.2 mm (8.98”)
2×5.5 mm (0.22”)
1.3 mm
(0.05”)
9.8 mm
(0.39”)
60.7 mm
(2.39”)
235.0 mm (9.25”)
242.5 mm
(9.55”)
38.0 mm
(1.50”)
60.7 mm
(2.39”)
232.0 mm
(9.14”)
242.6 mm
(9.55”)
Front View
Side View
Rear View
System Overview
Appearance
Note: Refer to installation drawings provided with system.
