INTELLIGEN MV DISPENSE SYSTEM
12
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Install the Pump
Step 1: Preparation
1. Use the dimensional drawings as a reference
for dimensions and locations.
2. Leave appropriate space around the system
to perform any connections, maintenance
or troubleshooting. Clearance space can be
shared space with other equipment.
3. Verify all system facility hookups including
liquid and power supplies. Refer to system
specifications.
Step 2: Unpack and Position the System
Allow space to make fluid fitting connections and
power and other cable connections. Please consult
customer support with any installation questions.
1. Remove the outer protective bags in your change
room. Wipe the inner bags according
to your cleanroom procedures.
2. Bring the system components to the installation
location. Remove the inner bags.
3. Leave enough clearance around the system to
allow service access. Refer to system dimensional
drawings on previous pages.
Step 3: Connect Electrical Supply Cable
1. Connect power/communications cable. Contact
Entegris for any pinout or connection details.
Step 4: Connect N
2
and Vacuum Supplies
1. Connect filtered and regulated N
2
or CDA
supply to the inlet connection. Do not turn
on the supply at this time.
2. Connect vacuum supply to the vacuum
connector. Rating is >20 in Hg.
Step 5: Install the Filter
The dispense system cannot operate without a
filter or a flushing shell installed.
WARNING! POTENTIAL CHEMICAL HAZARD!
Obtain the chemical supplier’s MSDS sheets
for specific health and safety information.
WARNING! Wear chemical-resistant garments
and eye protection at all times when working
on or near the fluid system. Obtain the chemi-
cal supplier’s MSDS for each chemical in use
for specific health and safety information.
NOTE: UPE filter membrane does not require
pre-wetting for use with most photochemicals.
Consult a technical support representative for
additional information on filter selection and
compatibility.
1. Wear protective personal protection equipment.
2. Pull down the tab on the lever until it clears
the catch (shown with filter installed for
reference).
3. Raise the lever to open the filter manifold.
4. Verify that only
ONE
set of o-rings is used.
WARNING! POTENTIAL CHEMICAL LEAK!
Use one set of o-rings only. Check that the
filter has o-rings. NEVER use o-rings on both
the filter and the manifold or the system may
leak.
!
!
!
