INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
31
Maintenance
The system needs no special maintenance beyond
periodically changing the filter and flushing the
system when necessary.
Changing the Filter
Filter replacement can be set on the MMI by using
the "Filter Cycle Alarm Limit" feature on the
Systems tab.
WARNING! POTENTIAL CHEMICAL HAZARD!
Obtain the chemical supplier’s MSDS sheets
for specific health and safety information.
Wear chemical-resistant garments and eye
protection while draining the system, changing
the filter and during start-up. Dispose of the
used filter in a manner that is consistent with
approved regulations and the guidance of the
chemical supplier.
NOTE: UPE filter membrane does not require
pre-wetting for use with most photochemicals.
Consult a technical support representative for
additional information on filter selection and
compatibility.
1. Verify that the pump is off-line (no dispense
signals will be received during the filter
changeout process).
2. Pull down the tab on the lever until it clears
the catch.
3. Raise the lever to open the filter manifold
and remove the old filter.
4. Verify that only
ONE
set of o-rings is used.
WARNING! POTENTIAL CHEMICAL LEAK!
Use one set of o-rings only. Check that
the filter has o-rings. NEVER use o-rings
on both the filter and the manifold or the
system may leak.
5. Slide in a new filter.
WARNING! PINCH HAZARD! Keep
fingers clear of jaw mechanism
to prevent personal injury.
6. Lower the lever until the tab clicks into place on
the filter.
7. Dispose of the used filter in accordance
with all appropriate safety and disposal
laws, regulations, and safety requirements.
8. To prime a new filter, see
Priming the Pump.
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