INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
1
Table of Contents
Overview .............................................................. 2
Liability Ownership ................................................ 2
General Manual Notes ....................................... 2
Changes to the Manual .......................................... 2
Intended Audience .................................................. 2
Intended Use/Scope ............................................... 2
Safety .................................................................. 3
Handling .................................................................. 4
Chemical Leaks ....................................................... 4
Specifications ..................................................... 6
Compatibility ...................................................... 7
System Overview ................................................. 8
Appearance .............................................................. 9
Two-state Technology
Operating Principle ................................................ 9
Quick Filter Changeout ......................................... 9
Installation ....................................................... 11
Handling ................................................................ 11
Facility Requirements .......................................... 11
Tools and Materials .............................................. 11
Install the Pump ................................................... 12
Install the Filter ................................................... 12
Storage ................................................................... 13
MMI Software ................................................... 14
Installing Software ............................................... 14
Connect Tab ........................................................... 15
System Tab ............................................................ 16
Priming Tab ........................................................... 17
Status Tab .............................................................. 20
Alarms Tab ............................................................ 22
Recipe Tab ............................................................. 23
Recharge Tab ......................................................... 24
Utility Tab .............................................................. 24
Info Tab .................................................................. 24
Self Test Tab .......................................................... 24
Profiling Tab .......................................................... 24
Confirmation Tab .................................................. 26
Maintenance ..................................................... 31
Changing the Filter .............................................. 31
Flushing the System ............................................. 32
Updating the Firmware ....................................... 33
Troubleshooting .............................................. 34
Appendix: Priming Recipe Information ......... 36
Guidelines for Priming a New Filter .................. 36
Priming Settings ................................................... 36
Priming Sequence Examples .............................. 37
Manufacturing Information ............................ 39
System Relocation Notice .................................... 39
Spare Parts ............................................................ 39
Technical Support ................................................ 39
Terms and Conditions of Sale ......................... 39
Product Warranties ......................................... 39
Repair Service ....................................................... 39
