INTELLIGEN MV DISPENSE SYSTEM
22
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Alarms Tab
The Alarms tab displays information on the pump system’s current state and history.
Types of Alarms
Each header description on the Alarms page can be sorted by double clicking on it (type, time, code, etc.).
Use the “Save Alarms Log” to save the log history to a csv file.
Error Type
Action
Solution
Critical error
Pump shuts down immediately.
Motors are disabled.
Clear error. If problem persists,
call Entegris support.
System error
Pump stops dispensing after
completing the cycle.
Motors are not disabled.
Clear error.
Something changed in system;
check system setup.
System warning
An event occurred that did not
affect the system. Pump continues
to operate normally.
Investigate cause of warning.
Information
An event occurred that did not
affect the system.
Pump continues to operate normally.
No effect. Alarm log only.
