INTELLIGEN MV DISPENSE SYSTEM
20
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Status Tab
The Status tab displays realtime data of the dispense system.
When the dispense pump is dispensing or recharging, the status will show “Busy”.
When a warning has been triggered, the status will display “Warning”.
The dispense pump will still function.
When an error has been triggered, the status will display “Error”.
The dispense pump will stop dispensing.
Pump status bar -
Information and
cycle counts
Last dispense
information
Quick access
commands
System pressure and vacuum
readings with color display:
Green = OK
Yellow = Close to specification
Red = Out of specification
Enhanced realtime pump
representation with
current pressures at sensors
Expanded realtime graphics
