INTELLIGEN MV DISPENSE SYSTEM
34
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Troubleshooting
This section covers some of the common problems
and solutions for the dispense system. Refer to the
“Serial Communications Protocol” for details on
event codes, error codes, and other details, if required.
After making any adjustments, test the result with
2-3 dispenses. If the solutions in this section do not
help, please contact technical support.
Pump Does Not Dispense
Problem
Solution
Pump is not responding
Check the electrical connections between the pump, the interface
module, and the track.
Check that the N
2
or CDA supply is on.
External stop valve not operating
Verify pneumatic connections to the external valve.
Pump is in error state
Clear alarm code using the MMI then clear errors. Refer to error
code listing.
Improper N
2
/CDA pressure or vacuum applied
Verify N
2
or CDA and vacuum supply pressure (check connections
and facility supplies).
No chemical in pump
Replace source bottle and prime the pump.
Replace filter if chemical has dried out.
Bubbles in tubing
Check for leaks. Check fitting connections and tubing.
Poor Quality Dispense
If the dispense quality is poor (whether at the start, stop or middle of dispense), check the following:
Problem
Solution
Air trapped in lines
Perform multiple dispenses using high volume and high rate.
Nozzle too high or nozzle ID too large
Adjust nozzle height and size for dispense rate and viscosity.
Poor Start of Dispense
If the problem is related to the start of the dispense, check the following:
Symptom
Problem
Solution
Fluid pulls up in nozzle before
dispense starts
External stop valve opening
too soon
Slow down the valve through the external
stop valve setup.
Double dispense: dispense starts, stops,
then proceeds with main dispense
External stop valve opening
too late
Open valve more quickly through the
external stop valve setup.
