INTELLIGEN MV DISPENSE SYSTEM
2
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Overview
Entegris, Inc. provides the enclosed product
manual for your information.
Prior to using this manual, the user should verify
with the product manufacturer that the user has
the most recent copy of the product manual.
This manual is owned by Entegris, Inc., an affiliated
company or its suppliers and title shall not pass to
you as a result of your use of the manual.
Liability Ownership
Read the following carefully before continuing:
In no event shall Entegris or its suppliers be liable
for any damages whatsoever (including, without
limitation, damages for loss of business profits,
business interruption, loss of business information
or any pecuniary loss) arising out of the use of or
inability to use this manual, even if Entegris has
been advised of the possibility of such damages.
General Manual Notes
Changes to the Manual
The manufacturer reserves the right to make
changes to the product covered in this manual
to improve performance, reliability or manufac-
turability.
Although every effort has been made to ensure
accuracy of the information contained in this man-
ual, the manufacturer assumes no responsibility
for inadvertent errors. Contents of the manual are
subject to change without notice.
Intended Audience
This manual is intended for technicians involved in
semiconductor manufacturing, and assumes that
each individual is familiar with the proper handling
of photochemicals and other potentially hazardous
materials. Users must also be familiar with install-
ing and using software on a computer running the
Windows
®
operating system.
Intended Use/Scope
This manual is intended to be used by experienced
technicians for the planning, installation, and oper-
ation of the described pump system. This manual
contains basic safety information and contains basic
safety information for the installation and use of
the pump system. This manual covers the pump
system only.
WARNING! Mishandling products exposed
to a hazardous substance may result in death
or serious injury. Always follow the recom-
mendations and guidelines provided by the
chemical suppliers and manufacturers. Always
wear appropriate personal protection equip-
ment as required for the chemicals in use.
Refer to the Material Safety Data Sheets
(MSDS) for each chemical.
!
