INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
33
1. Remove all tubing connections and drain and
flush them separately.
2. Remove the filter and replace it with a flushing
shell.
3. Remove the pressure source from the pump to
float the valves.
4. Reattach tubing to the pump to avoid splattering
the photochemicals.
5. Empty the lines as follows:
• Pressurize the inlet line with N
2
or CDA to
push the photochemical through the filter inlet.
• Pressurize the purge line to push the
photochemical through the dispense line.
• Pressurize the vent line to push the
photochemical through the filter vent port.
6. Discharge solvent, followed by IPA, through
the pump using the inlet, purge and vent lines.
Attach a pressurized source of the fluid to each of
the lines or use a gravity feed to each of the lines.
7. Blow dry the pump by applying compressed N
2
or CDA through the inlet, purge and vent lines.
Updating the Firmware
Pump and MMI Firmware Matching
If a pump is changed out, or software has been
upgraded on the controller, the system may display
an MMI firmware warning. To update firmware
from the controller to a pump, follow the screen
prompts.
1. On the Connections tab, select and open the
pump to be updated.
2. The MMI will detect that the pump has a
different firmware version and ask if you
want to update.
3. To update, select “Download”. The download
screen will display.
CAUTION! Do not interrupt the download pro-
cess. If the pump is powered down during the
flash process, it may cease to operate. If this
occurs, please contact Entegris for assistance.
4. When the download is complete, the download
windows will close.
NOTE: In some instances, the “Download
Firmware” screen may freeze. In this case,
moving the mouse will cause it to update.
In all cases, the entire firmware download
and flash process should be complete in less
than 5 minutes.
!
