INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
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8. Isolate pump from power sources to prevent
fluids from flowing through unit during cleanup
of leak or spill.
a. Use appropriate lockout/tagout out
procedures to de-energize unit.
b. De-energize all areas of unit that may be
in contact with spilled or leaking material.
c. When disconnecting nitrogen and/or any
pressurized gas, wear appropriate Personal
Protective Equipment (PPE) including gloves,
then close the facility gas supply to prevent
gas release when disconnecting lines.
9. If spilled material is within equipment, wipe
all surfaces carefully with wipes appropriate
for the chemical.
10. If material is contained in the tubing or the
pump, provide collection container under
the lines or pump during removal to collect
chemical and prevent additional spills.
11. Decontaminate surfaces with appropriate
decontamination materials per recommendation
of chemical manufacturer.
12. Contain cleanup materials and contaminated
debris and equipment.
13. Dispose of materials in accordance with local,
state and national regulatory requirements.
14. Provide any required service to the equipment
and verify all spilled material is collected or
cleaned from surfaces.
15. Replace any equipment and secure lines in
accordance with normal maintenance and
service requirements.
16. Confirm air levels are safe.
17. Return equipment to service per standard
procedures.
