INTELLIGEN MV DISPENSE SYSTEM
32
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Flushing the System
Clean and flush the dispense system when the
chemical is changed, when the system is removed
from service for an extended period of time, or
when the dispense system and lines require flush-
ing to remove particulates.
WARNING! Wear chemical-resistant garments
and eye protection when working with all
chemicals.
The following procedure covers most photochemical
applications, but chemicals used for flushing and
cleaning must be compatible with the fluid in the
pump. Contact the photochemical fluid manufac-
turer to verify that the flushing and cleaning
chemicals used will not adversely react with their
product and will be effective in flushing the pump.
Isopropyl alcohol (IPA) may react with the photo-
chemicals in the pump, so make sure that the
pumps and filters flushed with IPA are first flushed
with the photochemical base solvent before using
photoresist in the pump.
The amount of solvent, acetone and IPA used for
flushing are not fixed, but 500 – 750 mL is typical.
Depending upon the pump setup, the first 200 mL
of cleaning fluid can be recycled through the pump
to dissolve any residue. Remove and discard this
fluid, then pass fresh flushing chemical through
the pump and discard.
When changing photochemicals, the chemical
manufacturer may recommend a full tubing change
to avoid cross contamination. If the photochemical
solvent bases are the same, the acetone and IPA
flushes may not be necessary. Contact the photo-
chemical manufacturer for their recommended
procedure.
When flushing the pump to remove photoactive
compound (PAC) precipitates, contact the photo-
chemical manufacturer to determine the proper
solvent for dissolving the PAC crystals. In general,
the PAC crystals may not dissolve in a solvent base
and a stronger solvent such as N-methyl pyrrolidi-
none (NMP) may be required. PAC crystals remain-
ing in the pump may act as nucleation sites and
cause particulates. Flushing of the pump is accom-
plished using the Priming functions described in the
Priming section of this manual. In general, the rates
entered when flushing the pump can be higher than
when priming the system with chemical.
These settings will need to be adjusted for tubing
diameter, length, and the viscosity of the chemicals
in use.
Flushing a Working Pump
1. Remove the filter and replace it with a
flushing shell.
2. Connect the inlet line to a photoresist
solvent or a manufacturer recommended
stripper or thinner.
3. Follow the priming operation sequence to
flush out the pump, then continue to dispense
until the bulk of the original chemical is
removed from the pump.
4. Connect the inlet line to a container of a
manufacturer-recommended cleaning solvent.
5. Follow the priming operation sequence to
flush out the pump, then continue to dispense
until the bulk of the first cleaning agent is
removed from the pump.
6. Connect the inlet line to a container of
isopropyl alcohol (IPA) and flush the pump
with this solution to remove previous cleaning
agents from the pump.
7. Through the MMI, manually open all of
the pump valves. Also open the outlet valve.
8. Blow dry the pump using compressed and
filtered dry nitrogen. (A blow-down valve is
available on the prewet system. Turn the valve
clockwise to blowdown a pump.)
9. After 10 minutes, close the vent valve and
continue to blow-dry the pump for 10 minutes.
10. After 10 minutes, close the purge valve
and open the vent valve and continue to
blow-dry the pump for 10 minutes.
11. After 10 minutes re-open the purge valve and
let the dry nitrogen flow through the pump for
10 minutes.
12. Turn off the nitrogen blow-dry valve.
Close all pump valves.
Flushing a Nonworking Pump
Use this procedure to flush and dry a pump that is
not properly functioning and needs to be returned
to the factory for rebuild. Contact Entegris prior
to returning any device for service and to obtain
appropriate forms to certify proper decontamina-
tion and handling of the dispense system by
all personnel.
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