INTELLIGEN MV DISPENSE SYSTEM
14
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Storage
Short-term “Wet” Storage
A wet pump should be left in auto-recirculation
mode to recirculate fluid and avoid problems
related to stagnant chemical.
Long-term “Dry” Storage
For long-term storage, the pump should be flushed
and cleaned prior to performing a shut-down. See
the
Flushing the System
section of this manual.
MMI Software
The new and improved user-friendly MMI
(Man-Machine Interface) Software provides
more information at the point of dispense for
better control of the dispense.
New features include:
• A pressure sensor on the fill side of the dispense
pump to better understand what is occurring
during the fill stage. This allows better recharge
control and also provides an indication of when
filter replacement is necessary. • An improved
dispense confirmation page with additional tests
to determine the changes that occur between dis-
penses with the ability to
compare dispenses and the referenced dispense
assigned to the recipe number.
• An improved profiling page that allows side-by-
side comparisons between last dispense profile,
any saved dispense profile, or any referenced
dispense profile (accessed from the Confirma-
tion page) for four traces: dispense pressure,
dispense motor position, fill pressure, and fill
motor position.
• A self-test page with tests designed to evaluate
the status of the dispense pump.
• An improved alarms page that allows the user
to search and sort alarms history to determine
changes to the system. Every header column
can be sorted.
• An information page that allows the user to
assign names for fab, tool, coater, resist, or fluid.
This page also is a quick reference pump infor-
mation page.
• A mouse-over feature that provides a brief
description, the minimum and maximum limits,
and the default value.
• The ability to record pump information in
real time and save to csv file.
Installing Software
To program the pump, you must establish commu-
nications with a host computer, laptop or similar
system, using the supplied software.
To install the software and establish communica-
tions with the dispense system:
1. Verify that a filter has been installed in the
pump.
2. Connect the cables as appropriate for your
configuration, as covered in the
Installation
section of this manual.
3. Verify that power is being supplied to the
dispense system.
4. Install the MMI software into a separate
directory on your computer, then double-click on
the *.exe file to start the program.
