entegris INTELLIGEN MV Installation And Use Manual Download Page 39

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ENTEGRIS, INC.

Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USA

Customer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022

In North America 800 394 4083 |

www.entegris.com

Entegris

, the Entegris Rings Design

, Creating a Material Advantage

, Impact

, Connectology

and IntelliGen

are registered trademarks of Entegris, Inc.

Flowell

™

is a trademark of Flowell Corporation.

Kalrez

is a trademark of E.I. du Pont de Nemours and Company.

Pillar

is a trademark of Nippon Pillar Packing Company, Ltd.

Windows

is a trademark of Microsoft Corporation.

Summary of Contents for INTELLIGEN MV

Page 1: ...Installation and use manual INTELLIGEN MV DISPENSE SYSTEM CRITICAL MATERIALS HANDLING...

Page 2: ...Install the Pump 12 Install the Filter 12 Storage 13 MMI Software 14 Installing Software 14 Connect Tab 15 System Tab 16 Priming Tab 17 Status Tab 20 Alarms Tab 22 Recipe Tab 23 Recharge Tab 24 Utili...

Page 3: ...ty Although every effort has been made to ensure accuracy of the information contained in this man ual the manufacturer assumes no responsibility for inadvertent errors Contents of the manual are subj...

Page 4: ...to potential hazards Always follow established industrial safety practices when operating the equipment CAUTION End of life statement De commissioning of the system or any part of the system shall be...

Page 5: ...e follow the instructions below 1 Determine chemical currently in use with pump 2 Obtain Material Safety Data Sheet a Determine if any incompatible materials may come in contact with the leaking mater...

Page 6: ...surfaces carefully with wipes appropriate for the chemical 10 If material is contained in the tubing or the pump provide collection container under the lines or pump during removal to collect chemica...

Page 7: ...a 469 kPa 65 psi 68 psi Vacuum 68 kPa 20 in Hg min Dimensions Height 242 6 mm 9 55 Width 60 7 mm 2 39 Depth 235 0 mm 9 25 Weight Approx 5 kg 11 lb Electrical Current rating 1 25A Input voltage system...

Page 8: ...ropylacetone MCA methyl cellosolve acetate 2 Methoxyethyl acetate Mesitylene 1 3 5 trimethylbenzene Methyl acetate methyl acetic ester Methyl alcohol Methyl ethyl ketone 2 Butanone 2 Methoxy 1 propano...

Page 9: ...acuum inlet Pressure inlet Fluid inlet Vent Fluid outlet 228 2 mm 8 98 2 5 5 mm 0 22 1 3 mm 0 05 9 8 mm 0 39 60 7 mm 2 39 235 0 mm 9 25 242 5 mm 9 55 38 0 mm 1 50 60 7 mm 2 39 232 0 mm 9 14 242 6 mm 9...

Page 10: ...nt of the fill and filtration rate Simultaneously during dispense the inlet valve can open and begin filling the inlet chamber 3 FILTRATION State The isolation and barrier valves open and the fill mot...

Page 11: ...er can be placed into the service area then slid into the manifold This feature allows easy installation into tight areas with drip trays etc below the equipment CAUTION DRIP HAZARD If the pump has be...

Page 12: ...care Do not scratch or over tighten any part Handling Use care when lifting and carrying the pump The pump weighs in excess of 5 kg 11 lb has blunt edges and can cause pinch or other personal injury W...

Page 13: ...tion details Step 4 Connect N2 and Vacuum Supplies 1 Connect filtered and regulated N2 or CDA supply to the inlet connection Do not turn on the supply at this time 2 Connect vacuum supply to the vacuu...

Page 14: ...oint of dispense CAUTION DRIP HAZARD Do not over tighten fittings Excessive force will damage the internal seals Tighten the fittings by hand then use a small adjustable wrench to tighten for the fina...

Page 15: ...saved dispense profile or any referenced dispense profile accessed from the Confirma tion page for four traces dispense pressure dispense motor position fill pressure and fill motor position A self t...

Page 16: ...tup 2 Enter the Address or click Scan to search for pump connections Each IntelliGen MV system can be assigned a unique address from 1 to 63 3 Click Connect to connect to the pump The Connect tab will...

Page 17: ...0 REV A ENTEGRIS INC System Tab The System tab provides variables relating to the system management of the pump Variables can be changed from the default values to optimize the dispense system Use the...

Page 18: ...aved File to load an existing priming sequence Use Creating a Sequence to create a new priming sequence Samples of priming sequences are provided in Appendix 1 Loading a Sequence from a Saved File A p...

Page 19: ...y 1 Under Type select a type of priming 2 Under Count enter how many times the type of priming is to be performed 3 For each step type rates can be changed based on application needs 4 Continue adding...

Page 20: ...tab is divided into three sections In the top section pump status and priming step is displayed In the middle section an estimated time of completion and countdown is displayed In the priming field fi...

Page 21: ...status will display Warning The dispense pump will still function When an error has been triggered the status will display Error The dispense pump will stop dispensing Pump status bar Information and...

Page 22: ...ges This will clear all active warnings and errors This will open the vent valve relieving pressure on the fill side of the filter This will open the outlet valve relieving pressure on the fill and di...

Page 23: ...o a csv file Error Type Action Solution Critical error Pump shuts down immediately Motors are disabled Clear error If problem persists call Entegris support System error Pump stops dispensing after co...

Page 24: ...les that control dispense To import or save all recipes or individual recipes 1 Click on the Menu logo 2 Select File 3 Select Import or Save To Import Assign a number to the file then press Open To Sa...

Page 25: ...ems that pertain to individual pump tracking records and dispense statistical history The screen also allows entry of information of system specifications including location type and fluid being used...

Page 26: ...ile A and Profile B Example plots are shown below Single profile display Comparison profiles displayed This will load the latest dispense to the graph below This shows or hides the profile from the gr...

Page 27: ...et to warning or error Alarm limits upper and lower can be set by the user A referenced dispense profile can be saved and viewed for each recipe Last dispense cycle number Load both profiles onto the...

Page 28: ...e cleared before operation can continue Warning Limit Pump will generate a warning if the dispense confirmation value for the current dispense is below the user settable limit Pump will continue to op...

Page 29: ...NTEGRIS INC Confirmation Example Since All Confirmation Alarms was disabled the data field shows what the results would have been if the confirmations test was enabled The results show one test condit...

Page 30: ...SE MANUAL P N P92500 REV A 29 Reading the Results Read the results as a sentence In this example Air Detect Volume would have triggered an alarm if enabled Result shown in data field and Overall Confi...

Page 31: ...first selecting a reference and then pressing Load in the Reference Only section When pressing Load in Last Dispense with Reference section the reference profile will load automatically Standard profi...

Page 32: ...e pre wetting for use with most photochemicals Consult a technical support representative for additional information on filter selection and compatibility 1 Verify that the pump is off line no dispens...

Page 33: ...C crystals remain ing in the pump may act as nucleation sites and cause particulates Flushing of the pump is accom plished using the Priming functions described in the Priming section of this manual I...

Page 34: ...Blow dry the pump by applying compressed N2 or CDA through the inlet purge and vent lines Updating the Firmware Pump and MMI Firmware Matching If a pump is changed out or software has been upgraded o...

Page 35: ...essure or vacuum applied Verify N2 or CDA and vacuum supply pressure check connections and facility supplies No chemical in pump Replace source bottle and prime the pump Replace filter if chemical has...

Page 36: ...e 0 05 cc s and 0 5 cc respectively This gives the chemical 10s to flow back Optimize the parameters accordingly High Particle Counts on Wafer If there are high particle counts check the following Pro...

Page 37: ...bulk of the air from the filter downstream of the membrane Inlet cycles will recirculate the fluid through the filter and back to the inlet with a small amount of vent This completes the wetting of t...

Page 38: ...ou Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit www entegris com and select the Legal Notices link from the...

Page 39: ...nc All rights reserved Printed in USA 3811 7730ENT 1214 Entegris the Entegris Rings Design Creating a Material Advantage Impact Connectology and IntelliGen are registered trademarks of Entegris Inc Fl...

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