INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
9
Two-stage Technology Operating Principle
The IntelliGen dispense system uses a proven, unique two-stage design to operate dispense and
filtration functions independently. Filtration occurs at a reduced rate, which prevents microbubble
formation and maximizes filter performance.
The system uses two motors (one for fill, one for dispense), and advanced fluid paths to deliver extreme
repeatability at dispense rates down to 0.1 mL /sec. During normal operation, the dispense system cycles
through the dispense/fill, filtration, vent, purge, fill /ready and ready states.
1. READY State
• The inlet, external outlet, vent and purge
valves are closed.
• The isolate and barrier valves remain open
for a time to allow the system to reach ambient
pressure, then the valves close.
• The dispense chamber is full of fluid and is
ready to dispense.
2. DISPENSE and FILL State
• The external valve opens as the dispense
motor pushes fluid through the outlet and
onto the wafer.
• The dispense rate and volume are motor-
controlled and independent of the fill and
filtration rate.
• Simultaneously during dispense, the inlet valve
can open and begin filling the inlet chamber.
3. FILTRATION State
• The isolation and barrier valves open and the
fill motor pushes fluid through the filter and
into the dispense chamber, as the dispense
motor retracts.
• At the programmed filtration rate, the dispense
chamber fills with filtered fluid.
4. VENT State
• The barrier valve closes and the vent valve opens.
• The fill motor pushes fluid and bubbles upstream
of the filter membrane through the vent port.
5. PURGE State
• The barrier valve closes as the purge valve
opens and the dispense motor pushes fluid out
of the dispense chamber to the inlet source.
This step ensures that the dispense fluid
contains no bubbles.
6. READY/FILL State
• The dispense chamber is full of fluid and
ready to dispense.
Quick Filter Changeout
Patented Connectology
®
allows start-to-finish filter
change in under a minute. No tools are required, no
photochemicals to clean up and there is minimal
personnel exposure to potentially hazardous volatile
organic compounds (VOCs). Additionally, the dis-
pense systems use a patented two-stage technology
which provides rapid priming of the filter, resulting
in significant chemical savings.
Dispense/Fill
Filtration
Purge
Fill/Ready
Ready
Vent
(optional)
